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Published in:
Three-Dimensional Topography Simulator: 3D-MULSS and Its Applications Read chapter Read first chapter

1995 | OriginalPaper | Chapter

3D Process Simulation Requirements And Tradeoffs From Industrial Perspective

Author : Marius Orlowski

Published in: 3-Dimensional Process Simulation

Publisher: Springer Vienna

Included in: Professional Book Archive

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This paper discusses the requirements, challenges, tradeoffs, obstacles, economic constraints, and managerial options for three-dimensional process simulation in the context of present and anticipated technology needs.

previous chapter Multi-Dimensional TCAD: The PROMPT/DESSIS Approach
Metadata
Title
3D Process Simulation Requirements And Tradeoffs From Industrial Perspective
Author
Marius Orlowski
Copyright Year
1995
Publisher
Springer Vienna
Book
3-Dimensional Process Simulation

Print ISBN: 978-3-7091-7430-2

Electronic ISBN: 978-3-7091-6905-6

Copyright Year: 1995

DOI
https://doi.org/10.1007/978-3-7091-6905-6_9

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