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Frontiers of Mechanical Engineering
Published in: Frontiers of Mechanical Engineering 2/2023

01-06-2023 | Research Article

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

Authors: Wendi Gao, Bian Tian, Cunlang Liu, Yingbiao Mi, Chen Jia, Libo Zhao, Tao Liu, Nan Zhu, Ping Yang, Qijing Lin, Zhuangde Jiang, Dong Sun

Published in: Frontiers of Mechanical Engineering | Issue 2/2023

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Metadata
Title
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement
Authors
Wendi Gao
Bian Tian
Cunlang Liu
Yingbiao Mi
Chen Jia
Libo Zhao
Tao Liu
Nan Zhu
Ping Yang
Qijing Lin
Zhuangde Jiang
Dong Sun
Publication date
01-06-2023
Publisher
Higher Education Press
Published in
Frontiers of Mechanical Engineering / Issue 2/2023
Print ISSN: 2095-0233
Electronic ISSN: 2095-0241
DOI
https://doi.org/10.1007/s11465-023-0747-1

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