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2013 | OriginalPaper | Chapter

5. A Hybrid Control Approach to Nanopositioning

Authors : Tomas Tuma, Abu Sebastian, John Lygeros, Angeliki Pantazi

Published in: Smart Materials-Based Actuators at the Micro/Nano-Scale

Publisher: Springer New York

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Abstract

Precise position control on the nanometer and subnanometer scale, referred to as nanopositioning, is a key enabler for nanoscale science and engineering. In nanopositioning, feedback control is essential to meet the stringent requirements on accuracy, stability, and repeatability in the presence of model uncertainties and environmental disturbances. In this chapter, we review a new hybrid control approach to nanopositioning which is based on the combination of a continuous-time control law with impulsive modifications of the controller states. By using impulsive control, the limitations of conventional linear controllers can be overcome, such as the inherent trade-off between closed-loop bandwidth and resolution. We review the related literature, present an in-depth analysis of the stability and performance characteristics of impulsive control, and verify the theoretical conclusions experimentally using a custom-built atomic force microscope.

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Title: A Hybrid Control Approach to Nanopositioning
Authors: Tomas Tuma
Abu Sebastian
John Lygeros
Angeliki Pantazi
Publisher: Springer New York
Book: Smart Materials-Based Actuators at the Micro/Nano-Scale
Print ISBN: 978-1-4614-6683-3

Electronic ISBN: 978-1-4614-6684-0

Copyright Year: 2013
DOI: https://doi.org/10.1007/978-1-4614-6684-0_5