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Microsystem Technologies
Published in: Microsystem Technologies 12/2017

16-02-2017 | Technical Paper

A low-stress and low temperature gradient microgripper for biomedical applications

Authors: Einas Gaafar, Musaab Zarog, IEEE senior member

Published in: Microsystem Technologies | Issue 12/2017

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Abstract

Microelectromechanical systems based micro gripper is one of the major focuses for many medical applications such as microsurgery, micro assembling and testing of micro components, and measuring properties of biological cells as well as small-scale tissue manipulation. This paper presents an electrostatically actuated micro gripper. Different materials sets (Si/SiO2 and polysilicon/Si3N4) were investigated to design electrostatic comb drive micro gripper. The main characteristics of the micro gripper were analyzed using a finite element model (ANSYS software). These characteristics include; the maximum displacement of gripper arms, stresses in the micro gripper, the gripping force, and heat generated from joule heating. It is demonstrated that the proposed design will produce negligible increase in temperature and stresses developed during operation because of applying the actuation voltage.
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Metadata
Title
A low-stress and low temperature gradient microgripper for biomedical applications
Authors
Einas Gaafar
Musaab Zarog
IEEE senior member
Publication date
16-02-2017
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 12/2017
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3325-9

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