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Microsystem Technologies

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01-01-2014 | Technical Paper

A rotary comb-actuated microgripper with a large displacement range

Authors: Honglong Chang, Haitao Zhao, Fang Ye, Guangmin Yuan, Jianbing Xie, Michael Kraft, Weizheng Yuan

Published in: Microsystem Technologies | Issue 1/2014

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Abstract

This paper reports a novel design for electrostatic microgrippers. The new structure utilizes rotary comb actuators to solve the pull-in problem of microgrippers during large displacement manipulation and therefore avoids the widely used conversion systems which necessitate a high driving voltage. The gripper is fabricated using a SOI process with a 60 μm structural layer. Test results show the gripper obtained a displacement of 94 μm with an applied voltage of 100 V. An animal hair is gripped to demonstrate the applicability of the gripper for micro object manipulations.

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Title: A rotary comb-actuated microgripper with a large displacement range
Authors: Honglong Chang
Haitao Zhao
Fang Ye
Guangmin Yuan
Jianbing Xie
Michael Kraft
Weizheng Yuan
Publication date: 01-01-2014
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 1/2014
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-013-1737-8

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