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Microsystem Technologies
Published in: Microsystem Technologies 4/2018

20-10-2017 | Technical Paper

A simple method for shape modulation in microlens array fabrication via spin-coating process

Authors: Shengzhou Huang, Mujun Li, Lianguan Shen, Jinfeng Qiu, Youquan Zhou

Published in: Microsystem Technologies | Issue 4/2018

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Abstract

In this paper, a simple method for microlens array (MLA) fabrication is presented by the modulation of spin-coating process. Firstly, micro holes with design diameters were prepared on substrate through maskless lithography based on the digital micromirror device. Next by the spin-coating of photoresist onto the substrate the meniscus concave microlens with various curvatures can be formed, and then become stable after a proper baking process. During the coating process, the photoresist was strictly confined in the micro holes and its volume could be precisely controlled by adjusting the spin-coating speed. These advantages make it very easy to obtain microlenses with different aspect ratios at precisely pre-defined diameters. Experimental results showed the effectiveness of our method. The presented method is expected to provide a novel, economic and simple strategy for shape modulation in MLA fabrication.
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Metadata
Title
A simple method for shape modulation in microlens array fabrication via spin-coating process
Authors
Shengzhou Huang
Mujun Li
Lianguan Shen
Jinfeng Qiu
Youquan Zhou
Publication date
20-10-2017
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3571-x

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