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Published in:
1984 | OriginalPaper | Chapter
Accurate Measurement of Energy Distribution Curves of Secondary Ions by UHV-IMMA
Authors : O. Tsukakoshi, K. Komatsu, S. Komiya
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The UHV-IMMA [1] developed at ULVAC Laboratory has excellent capability to measure energy distribution of secondary ions. As shown in Figure 1, hemispherical electrostatic ion energy analyser (IEA) with central orbit radius of 1.5 cm has been designed and normal incidence of primary ion beam on the sample surface and extraction of secondary ion beam normal to the sample surface have been made possible.