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Published in: Microsystem Technologies 10-11/2009

01-10-2009 | Technical Paper

Active-head slider with piezoelectric actuator using shear-mode deformation

Authors: Irizo Naniwa, Kazuo Sato, Shigeo Nakamura, Kazutaka Sato

Published in: Microsystem Technologies | Issue 10-11/2009

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Abstract

The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. This paper describes a piezoelectric flying height control slider which has a faster dynamic response compared with conventional active-head sliders. This slider can be also adapted to the conventional slider-fabrication process. PZT layer located near the magnetic head has shear mode deformation by applying electric voltage between the upper and lower electrodes when the flying height of magnetic head needs to be decreased or increased. We fabricated a prototype with single crystal Si substrate for feasibility study. Our evaluation of the prototype revealed that the piezoelectric constant of the shear mode deformation was 0.88 nm/V, and the dynamic response was 50 kHz. The shape of the air bearing surface was optimized by simulations using a robust design method. We found that the stroke was 8 nm for an applied voltage of 11 V if the flying height was 11 nm with no deformation in PZT.

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Literature
go back to reference Gunderson NF, Schulz KJ, Bordson TA, Budde RA, Huha MA, Jiang M, Sluzewski DA, Wright JS, Berg LJ (2006) Component development and product integration of secondary piezoelectric actuator for disk drives. In: Joint conference on micromechatronics for information and precision equipment (S07-01) Gunderson NF, Schulz KJ, Bordson TA, Budde RA, Huha MA, Jiang M, Sluzewski DA, Wright JS, Berg LJ (2006) Component development and product integration of secondary piezoelectric actuator for disk drives. In: Joint conference on micromechatronics for information and precision equipment (S07-01)
go back to reference Kurita M, Tsuchiyama R, Tokuyama M, Xu J, Yoshimura Y, Kohira H, Su L, Kato K (2003) Flying-height adjustment of a magnetic head slider with a piezoelectric micro-actuator. IEEE Trans Magn 39(5):2480–2482. doi:10.1109/TMAG.2003.816444 CrossRef Kurita M, Tsuchiyama R, Tokuyama M, Xu J, Yoshimura Y, Kohira H, Su L, Kato K (2003) Flying-height adjustment of a magnetic head slider with a piezoelectric micro-actuator. IEEE Trans Magn 39(5):2480–2482. doi:10.​1109/​TMAG.​2003.​816444 CrossRef
go back to reference Kusumoto K (2007) “Technical handbook of piezoceramics. AIST (Japanese version) Kusumoto K (2007) “Technical handbook of piezoceramics. AIST (Japanese version)
go back to reference Sayer M, Judd BA, EI-Assal K, Prasad E (1981) Poling of piezoelectric ceramics. J Can Ceram Soc 50:91–310 Sayer M, Judd BA, EI-Assal K, Prasad E (1981) Poling of piezoelectric ceramics. J Can Ceram Soc 50:91–310
go back to reference Shiramatsu T, Kurita M, Miyake K, Suk M, Ohki S, Tanaka H, Saegusa S (2006) Drive integration of active flying-height control slider with micro thermal actuator. IEEE Trans Magn 42(10):2513–2515. doi:10.1109/TMAG.2006.880564 CrossRef Shiramatsu T, Kurita M, Miyake K, Suk M, Ohki S, Tanaka H, Saegusa S (2006) Drive integration of active flying-height control slider with micro thermal actuator. IEEE Trans Magn 42(10):2513–2515. doi:10.​1109/​TMAG.​2006.​880564 CrossRef
go back to reference Shiramatsu T, Atsumi T, Kurita M, Shimizu Y, Tanaka H (2008) Dynamically controlled thermal flying-height control slider, IEEE INTERMAG 2008, HO-05 Shiramatsu T, Atsumi T, Kurita M, Shimizu Y, Tanaka H (2008) Dynamically controlled thermal flying-height control slider, IEEE INTERMAG 2008, HO-05
go back to reference Storage Research Consortium (2006) SRC 21st technical review meeting general report Storage Research Consortium (2006) SRC 21st technical review meeting general report
go back to reference Suzuki K, Kurita M (2003) A MEMS-based active-head slider for flying height control in magnetic recording. In: The international symposium on micro-mechanical engineering (A22-022) Suzuki K, Kurita M (2003) A MEMS-based active-head slider for flying height control in magnetic recording. In: The international symposium on micro-mechanical engineering (A22-022)
go back to reference Takagi H, Matsumoto S, Maeda R (2003) Corrosion resistant and highly reliable integration technology for MEMS devices. AIST (G-04) Takagi H, Matsumoto S, Maeda R (2003) Corrosion resistant and highly reliable integration technology for MEMS devices. AIST (G-04)
go back to reference Xu BX, Hu SB, Yuan HX, Zhang J, Chen YJ, Ji R, Miao XS, Chen JS, Chong TC (2006) Thermal effect of heated magnetic disk on the slider in heat-assisted magnetic recording. J Appl Phys 99:08N102 Xu BX, Hu SB, Yuan HX, Zhang J, Chen YJ, Ji R, Miao XS, Chen JS, Chong TC (2006) Thermal effect of heated magnetic disk on the slider in heat-assisted magnetic recording. J Appl Phys 99:08N102
go back to reference Ishii K Design for manufacturability. Stanford University Ishii K Design for manufacturability. Stanford University
Metadata
Title
Active-head slider with piezoelectric actuator using shear-mode deformation
Authors
Irizo Naniwa
Kazuo Sato
Shigeo Nakamura
Kazutaka Sato
Publication date
01-10-2009
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 10-11/2009
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-009-0862-x

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