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The International Journal of Advanced Manufacturing Technology
Published in: The International Journal of Advanced Manufacturing Technology 1-4/2019

02-07-2019 | ORIGINAL ARTICLE

Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method

Authors: Ming-Fei Chen, Pei-Hao Wang, Wen-Tse Hsiao

Published in: The International Journal of Advanced Manufacturing Technology | Issue 1-4/2019

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Abstract

In this study, positioning error measurements and compensation techniques were developed for a two-dimensional (2D) coplanar aerostatic system. Standard optical template targets were acquired using charge-coupled device (CCD) image acquisition; after which, positioning errors were measured and compensated for. A 2D Lagrange equation was utilized to compensate for the precision of the precision aerostatic system. Experimental results showed that X- and Y-axis positioning accuracy improved from 5.06 to 1.53 μm and from 3.99 to 1.06 μm, respectively, signifying improvements of over 70%.
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Literature
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Miao SG (2013) “Digital Image Processing.” 3rd Edition, Gonzalez.
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Zhuang JR (2009) Development and testing of ultra-precision aerostatic guideway system. Master’s thesis, Department of Mechatronics Engineering, National Changhua University of Education.
Metadata
Title
Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method
Authors
Ming-Fei Chen
Pei-Hao Wang
Wen-Tse Hsiao
Publication date
02-07-2019
Publisher
Springer London
Published in
The International Journal of Advanced Manufacturing Technology / Issue 1-4/2019
Print ISSN: 0268-3768
Electronic ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-019-04077-3

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