Skip to main content
Top
Published in: International Journal of Mechanics and Materials in Design 1/2015

01-03-2015

Application of quadratic controller to control the pull-in instability of a micro-resonator

Authors: Meysam T. Chorsi, Saber Azizi, Firooz Bakhtiari-Nejad

Published in: International Journal of Mechanics and Materials in Design | Issue 1/2015

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

This study is on the nonlinear dynamics of a clamped–clamped electro-statically actuated capacitive micro-beam. The micro-resonator is composed of silicon and PZT as a piezoelectric material. PZT is functionally distributed along the height of the micro-beam according to the power law distribution law. The micro-resonator is simultaneously subjected to DC piezoelectric and AC harmonic actuations. The governing equation of the motion is derived by the minimization of the Hamiltonian and generalized to the viscously damped systems. The static and dynamic analysis of an electrostatically actuated micro beam with and without controller is presented. The results depict that by adding the controller we can increase the pull-in voltage of micro-resonator and consequently prevent the pull-in phenomena in micro-beam. The effect of varies controllers are discussed and changing the coefficients of quadratic controller are presented. Using frequency response curves, the effect of adding controller in the vicinity of primary resonance is presented.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
go back to reference Abdel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12(6), 759 (2002)CrossRef Abdel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrically actuated microbeam. J. Micromech. Microeng. 12(6), 759 (2002)CrossRef
go back to reference Alsaleem, F.M., Younis, M.I., Ouakad, H.M.: On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators. J. Micromech. Microeng. 19(4), 045013 (2009)CrossRef Alsaleem, F.M., Younis, M.I., Ouakad, H.M.: On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators. J. Micromech. Microeng. 19(4), 045013 (2009)CrossRef
go back to reference Fargas-Marques, A., Casals-Terre, J., Shkel, A.M.: resonant pull-in condition in parallel-plate electrostatic actuators. J. Microelectromech. Syst. 16(5), 1044–1053 (2007)CrossRef Fargas-Marques, A., Casals-Terre, J., Shkel, A.M.: resonant pull-in condition in parallel-plate electrostatic actuators. J. Microelectromech. Syst. 16(5), 1044–1053 (2007)CrossRef
go back to reference Nayfeh, A., Younis, M., Abdel-Rahman, E.: Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dyn. 48(1–2), 153–163 (2007)CrossRefMATH Nayfeh, A., Younis, M., Abdel-Rahman, E.: Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dyn. 48(1–2), 153–163 (2007)CrossRefMATH
go back to reference Younis, M.I., Nayfeh, A.H.: A study of the nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31(1), 91–117 (2003)CrossRefMATHMathSciNet Younis, M.I., Nayfeh, A.H.: A study of the nonlinear response of a resonant microbeam to an electric actuation. Nonlinear Dyn. 31(1), 91–117 (2003)CrossRefMATHMathSciNet
go back to reference Batra, R.C., Porfiri, M., Spinello, D.: Review of modeling electrostatically actuated microelectromechanical systems. Smart Mater. Struct. 16(6), R23 (2007)CrossRef Batra, R.C., Porfiri, M., Spinello, D.: Review of modeling electrostatically actuated microelectromechanical systems. Smart Mater. Struct. 16(6), R23 (2007)CrossRef
go back to reference Zhang, W.-M., Meng, G., Chen, D.: Stability, nonlinearity and reliability of electrostatically actuated MEMS devices. Sensors 7(5), 760–796 (2007)CrossRef Zhang, W.-M., Meng, G., Chen, D.: Stability, nonlinearity and reliability of electrostatically actuated MEMS devices. Sensors 7(5), 760–796 (2007)CrossRef
go back to reference Siewe, M.S., Hegazy, U.H.: Homoclinic bifurcation and chaos control in MEMS resonators. Appl. Math. Model. 35(12), 5533–5552 (2011)CrossRefMATHMathSciNet Siewe, M.S., Hegazy, U.H.: Homoclinic bifurcation and chaos control in MEMS resonators. Appl. Math. Model. 35(12), 5533–5552 (2011)CrossRefMATHMathSciNet
go back to reference Wen-Ming, Z., Guang, M.: Nonlinear dynamic analysis of electrostatically actuated resonant MEMS sensors under parametric excitation. Sensors Journal, IEEE 7(3), 370–380 (2007)CrossRef Wen-Ming, Z., Guang, M.: Nonlinear dynamic analysis of electrostatically actuated resonant MEMS sensors under parametric excitation. Sensors Journal, IEEE 7(3), 370–380 (2007)CrossRef
go back to reference Taghizadeh, M., Mobki, H.: Bifurcation analysis of torsional micromirror actuated by electrostatic forces. Arch. Mech. 66(2), 95–111 (2014)MATHMathSciNet Taghizadeh, M., Mobki, H.: Bifurcation analysis of torsional micromirror actuated by electrostatic forces. Arch. Mech. 66(2), 95–111 (2014)MATHMathSciNet
go back to reference Li, Y., Meguid, S.A., Fu, Y., Xu, D.: Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches. Acta Mech. 224(8), 1741–1755 (2013)CrossRefMATHMathSciNet Li, Y., Meguid, S.A., Fu, Y., Xu, D.: Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches. Acta Mech. 224(8), 1741–1755 (2013)CrossRefMATHMathSciNet
go back to reference Nemirovsky, Y., Bochobza-Degani, O.: A methodology and model for the pull-in parameters of electrostatic actuators. J. Microelectromech. Syst. 10(4), 601–615 (2001)CrossRef Nemirovsky, Y., Bochobza-Degani, O.: A methodology and model for the pull-in parameters of electrostatic actuators. J. Microelectromech. Syst. 10(4), 601–615 (2001)CrossRef
go back to reference Ofir, B.-D., Eran, S., Yael, N.: On the effect of residual charges on the pull-in parameters of electrostatic actuators. Sensors Actuators A Phys. 97, 563–568 (2002) Ofir, B.-D., Eran, S., Yael, N.: On the effect of residual charges on the pull-in parameters of electrostatic actuators. Sensors Actuators A Phys. 97, 563–568 (2002)
go back to reference Woo, J., Meguid, S.A.: Nonlinear analysis of functionally graded plates and shallow shells. Int. J. Solids Struct. 38(42–43), 7409–7421 (2001)CrossRefMATH Woo, J., Meguid, S.A.: Nonlinear analysis of functionally graded plates and shallow shells. Int. J. Solids Struct. 38(42–43), 7409–7421 (2001)CrossRefMATH
go back to reference Woo, J., Meguid, S.A., Ong, L.S.: Nonlinear free vibration behavior of functionally graded plates. J. Sound Vib. 289(3), 595–611 (2006)CrossRef Woo, J., Meguid, S.A., Ong, L.S.: Nonlinear free vibration behavior of functionally graded plates. J. Sound Vib. 289(3), 595–611 (2006)CrossRef
go back to reference Kapuria, S., Patni, M., Yasin, M.Y.: A quadrilateral shallow shell element based on the third-order theory for functionally graded plates and shells and the inaccuracy of rule of mixtures. Eur. J. Mech.-A/solids. 49, 268–282 (2015) Kapuria, S., Patni, M., Yasin, M.Y.: A quadrilateral shallow shell element based on the third-order theory for functionally graded plates and shells and the inaccuracy of rule of mixtures. Eur. J. Mech.-A/solids. 49, 268–282 (2015)
go back to reference Allahverdizadeh, A., Oftadeh, R., Mahjoob, M.J., Naei, M.H.: Homotopy perturbation solution and periodicity analysis of nonlinear vibration of thin rectangular functionally graded plates. Acta Mech. Solida Sin. 27(2), 210–220 (2014)CrossRef Allahverdizadeh, A., Oftadeh, R., Mahjoob, M.J., Naei, M.H.: Homotopy perturbation solution and periodicity analysis of nonlinear vibration of thin rectangular functionally graded plates. Acta Mech. Solida Sin. 27(2), 210–220 (2014)CrossRef
go back to reference El-Abbasi, N., Meguid, S.A.: A continuum based thick shell element for large deformation analysis of layered composites. Int. J. Mech. Mater. Des. 2(1–2), 99–115 (2005)CrossRef El-Abbasi, N., Meguid, S.A.: A continuum based thick shell element for large deformation analysis of layered composites. Int. J. Mech. Mater. Des. 2(1–2), 99–115 (2005)CrossRef
go back to reference Younis, M.I.: MEMS Linear and Nonlinear Statics and Dynamics. Microsystems. Springer, New York (2011)CrossRef Younis, M.I.: MEMS Linear and Nonlinear Statics and Dynamics. Microsystems. Springer, New York (2011)CrossRef
go back to reference Castaner, L.M., Senturia, S.D.: Speed-energy optimization of electrostatic actuators based on pull-in. J. Microelectromech. Syst. 8(3), 290–298 (1999)CrossRef Castaner, L.M., Senturia, S.D.: Speed-energy optimization of electrostatic actuators based on pull-in. J. Microelectromech. Syst. 8(3), 290–298 (1999)CrossRef
go back to reference Krylov, S.: Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures. Int. J. Non-Linear Mech. 42(4), 626–642 (2007)CrossRef Krylov, S.: Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures. Int. J. Non-Linear Mech. 42(4), 626–642 (2007)CrossRef
go back to reference Li, Y., Meguid, S.A., Fu, Y., Xu, D.: Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam.Proceedings of the Royal Society A: Mathematical, Phys Eng Sci. 470, 2162 (2014) Li, Y., Meguid, S.A., Fu, Y., Xu, D.: Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam.Proceedings of the Royal Society A: Mathematical, Phys Eng Sci. 470, 2162 (2014)
go back to reference Azizi, S., Rezazadeh, G., Ghazavi, M.-R., Khadem, S.E.: Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation. Appl. Math. Model. 35(10), 4796–4815 (2011)CrossRefMATH Azizi, S., Rezazadeh, G., Ghazavi, M.-R., Khadem, S.E.: Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation. Appl. Math. Model. 35(10), 4796–4815 (2011)CrossRefMATH
go back to reference Azizi, S., Ghazavi, M., Rezazadeh, G., Ahmadian, I., Cetinkaya, C.: Tuning the primary resonances of a micro resonator, using piezoelectric actuation. Nonlinear Dyn. 76(1), 839–852 (2014)CrossRef Azizi, S., Ghazavi, M., Rezazadeh, G., Ahmadian, I., Cetinkaya, C.: Tuning the primary resonances of a micro resonator, using piezoelectric actuation. Nonlinear Dyn. 76(1), 839–852 (2014)CrossRef
go back to reference Azizi, S., Ghazavi, M.-R., Esmaeilzadeh Khadem, S., Yang, J., Rezazadeh, G.: Stability analysis of a parametrically excited functionally graded piezoelectric, MEM system. Curr. Appl. Phys. 12(2), 456–466 (2012)CrossRef Azizi, S., Ghazavi, M.-R., Esmaeilzadeh Khadem, S., Yang, J., Rezazadeh, G.: Stability analysis of a parametrically excited functionally graded piezoelectric, MEM system. Curr. Appl. Phys. 12(2), 456–466 (2012)CrossRef
go back to reference Younis, M.I., Alsaleem, F., Jordy, D.: The response of clamped–clamped microbeams under mechanical shock. Int. J. Non-Linear Mech. 42(4), 643–657 (2007)CrossRef Younis, M.I., Alsaleem, F., Jordy, D.: The response of clamped–clamped microbeams under mechanical shock. Int. J. Non-Linear Mech. 42(4), 643–657 (2007)CrossRef
go back to reference Towfighian, S., Heppler, G.R., Abdel-Rahman, E.M.: Quadratic controller for a chaotic micro-resonator. In: IEEE, pp. 69–72 (2009) Towfighian, S., Heppler, G.R., Abdel-Rahman, E.M.: Quadratic controller for a chaotic micro-resonator. In: IEEE, pp. 69–72 (2009)
Metadata
Title
Application of quadratic controller to control the pull-in instability of a micro-resonator
Authors
Meysam T. Chorsi
Saber Azizi
Firooz Bakhtiari-Nejad
Publication date
01-03-2015
Publisher
Springer Netherlands
Published in
International Journal of Mechanics and Materials in Design / Issue 1/2015
Print ISSN: 1569-1713
Electronic ISSN: 1573-8841
DOI
https://doi.org/10.1007/s10999-014-9281-y

Other articles of this Issue 1/2015

International Journal of Mechanics and Materials in Design 1/2015 Go to the issue

Premium Partners