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Open Access 04-07-2023 | Research Article

Atomistic understanding of rough surface on the interfacial friction behavior during the chemical mechanical polishing process of diamond

Authors: Song Yuan, Xiaoguang Guo, Hao Wang, Renke Kang, Shang Gao

Title: Atomistic understanding of rough surface on the interfacial friction behavior during the chemical mechanical polishing process of diamond
Authors: Song Yuan
Xiaoguang Guo
Hao Wang
Renke Kang
Shang Gao
Publication date: 04-07-2023
Publisher: Tsinghua University Press
Published in: Friction / Issue 6/2024
Print ISSN: 2223-7690
Electronic ISSN: 2223-7704
DOI: https://doi.org/10.1007/s40544-023-0760-8

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