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Fundamentals of Sputtering Read chapter Read first chapter

1984 | OriginalPaper | Chapter

Automation of an Ion Microprobe Mass Analyzer

Authors : T. Suzuki, K. Tsunoyama

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Included in: Professional Book Archive

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Many reports have been published for the automatic control of SIMS instruments, but most of them are based on rather expensive systems. The present paper describes a more economical system for an Applied Research Laboratories’ Ion Microprobe Mass Analyzer.

previous chapter A Comparison of Camera-Based and Quantized Detectors for Image Processing on an Ion Microscope
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Metadata
Title
Automation of an Ion Microprobe Mass Analyzer
Authors
T. Suzuki
K. Tsunoyama
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
Book
Secondary Ion Mass Spectrometry SIMS IV

Print ISBN: 978-3-642-82258-2

Electronic ISBN: 978-3-642-82256-8

Copyright Year: 1984

DOI
https://doi.org/10.1007/978-3-642-82256-8_53