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Journal of Materials Science: Materials in Electronics

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13-09-2021

Boron doped SiC thin film on Silicon synthesized from polycarbosilane: a new lead free material for applications in piezosensors

Authors: Kusumita Kundu, Arnab Ghosh, Shewli Pratihar, Shiv Govind Singh, Tarun Kumar Kayal, Rajat Banerjee

Published in: Journal of Materials Science: Materials in Electronics | Issue 20/2021

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Abstract

In this paper, we are reporting for the first time, the piezosensing characterisations of the SiC thin film on silicon, synthesized from boron containing Liquid Polycarbosilane (PCS) as a precursor deposited by Modified Chemical Vapour Deposition (MoCVD) technique followed by the structural characterisation of the film. Comparison was done on the result of the both undoped and doped SiC thin film to highlight the effect of boron doping on the piezo property of the SiC. Interestingly, it was observed that piezoelectric coefficient (d₃₃) of the boron doped SiC thin film was substantially higher (21.33 pm/V) than the undoped SiC thin film (16.21 pm/V). The enhancement in d₃₃ was analysed considering the polarisation inside the thin film created by boron doping. The result shows a promising boron doped SiC thin film material for the application in high temperature piezo sensors.

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D.A. Parks, S. Zhang, B.T. Tittmann, High-temperature (>500 °C) ultrasonic transducers: an experimental comparison among three candidate piezoelectric materials. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 60, 1010–1015 (2013)CrossRef

R. Kazys, A. Voleisis, B. Voleisine, High Temp. Ultrason. Transducer: Review Ultragarsas J. 63, 7–17 (2008)

Parks D.A., Tittmann B.T. and Kropf M.M.: Aluminum Nitride as a High Temperature Transducer, in Review of Progress of Quantitative Nondestructive Evaluation, eds. D.O. Thompson and D.E. Chimenti, (American Institute of Physics 1211, Melville NY) 29, 1029–1034 (2010)

K. Matsuo, R.J. Xie, Y. Akimune, T. Sugiyama, Preparation of lead-free Sr2-xCaxNaNb5O15 (x = 0.1)-based piezoceramics with tungsten bronze structure. J. Ceram. Soc. Jpn. 110, 491–494 (2002)CrossRef

Y. Saito, H. Takao, T. Tani, T. Nonoyama, K. Takatori, T. Homma, T. Nagaya, M. Nakamura, Lead-free piezoceramics. Nature 432, 84–87 (2004)CrossRef

M.A. Fraga, H. Furlan, R.S. Pessoa, M. Massi, Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview. Microsyst Technol 20, 9–21 (2014)CrossRef

Q. Li, J. Wei, J. Cheng, J. Chen, High temperature dielectric, ferroelectric and piezoelectric properties of Mn-modified BiFeO3-BaTiO3 lead-free ceramics. J. Mater. Sci. 52, 229–237 (2017)CrossRef

Gupta S. and Priya S 2013 High thermal stability of piezoelectric properties in (Na_0.5Bi_0.5TiO₃)_x–(BaTiO₃)_y–(Na_0.5K_0.5NbO₃)_1−x−y ceramics. Appl. Phys. Lett. 102: e012906

A.R. Atwell, R.S. Okojie, K.T. Kornegay, S.L. Roberson, A. Beliveau, Simulation, fabrication and testing of bulk micromachined 6HSiC high-g piezoresistive accelerometers. Sens Actuators A Phys. 104, 11–18 (2008)CrossRef

10.

R.S. Okojie, A.R. Atwell, K.T. Kornegay, S.L. Roberson, A. Beliveau, Design considerations for bulk micromachined 6H-SiC high-G piezoresistive accelerometers. The fifteenth IEEE Int. Conf. on Micro Electro Mech. Syst. 1, 618–622 (2002)

11.

M. Mehregany, C.A. Zorman, N. Rajan, C.H. Wu, Silicon carbide MEMS for harsh environments. Proc IEEE 86, 1594–1609 (1998)CrossRef

12.

R.S. Okojie, D. Lukco, C. Blaha, V. Nguyen, E. Savrun, Zero offset drift suppression in SiC pressure sensors at 600°C. IEEE Sens. (2010). https://doi.org/10.1109/ICSENS.2010.5690714CrossRef

13.

A.A. Ned, R.S. Okojie, A.D. Kurtz, 6H-SiC pressure sensor operation at 600_C. Fourth Int. High Temp. Electron. Conf. (1998). https://doi.org/10.1109/HITEC.1998.676799CrossRef

14.

M.A. Fraga, H. Furlan, M. Massi, I.C. Oliveira, L.L. Koberstein, Fabrication and characterization of a SiC/SiO2/Si piezoresistive pressure sensor. Proc Eng 5, 609–612 (2010)CrossRef

15.

K. Kundu, J. Chakraborty, S. Kumar, N.E. Prasad, R. Banerjee, Enhancement of optical properties of boron doped SiC thin film –A SiC QD effect. Bulletin of Mater. sc. 43, 250 (2020)CrossRef

16.

S. Agathopoulos, Influence of synthesis process on the dielectric properties of B-doped SiC powders. Ceram. Int. 38, 3309–3315 (2012)CrossRef

17.

G.K. Williamson, R.E. Smallman, Dislocation densities in some annealed and cold-worked metals from measurements on the X-ray debye-scherrer spectrum. Phil. Mag. 1, 34–46 (1956)CrossRef

18.

F. Filippo, R. Enzo, L. Laura, F. Naoki, S. Giancarlo, Visible and Infra-red Light Emission in Boron-Doped Wurtzite Silicon Nanowires. Sci. Rep. 4, 3603 (2014)

19.

P. Lu, Q. Huang, A. Mukherjee, Y.L. Hsieh, Effects of polymer matrices to the formation of silicon carbide (SiC) nanoporous fibers and nanowires under carbothermal reduction. J. Mater. Chem. 21, 1005 (2011)CrossRef

20.

Y. Cheng, J. Zhang, Y. Zhang, X. Chen, Y. Wang, H. Ma, X. Cao, Preparation of hollow carbon and silicon carbide fibers with different cross-sections by using electrospun fibers as templates. Eur. J. Inorg. Chem. 28, 4248–4254 (2009)CrossRef

21.

A. Tamayo, J. Rubio, R. Pena-alonso, F. Rubio, J.L. Oteo, Gradient pore size distributions in porous silicon oxycarbide materials. J. Eur Ceram Soc. 28, 1871 (2008)CrossRef

22.

H. Sato, I. Shoji, J. Suda, T. Kondo, Accurate Measurements of Second-order Nonlinear-optical Coefficients of Silicon Carbide. Mater. Sci. Forum 615–617, 315–318 (2009)CrossRef

23.

M. Acosta, N. Novak, V. Rojas, S. Patel, R. Vaish, J. Koruza, Rosseti jr. G.A. and Rodel J. , BaTiO₃-based piezoelectrics: fundamentals, current status, and perspectives. Appl. Phys. Rev. 4, e041305 (2017)CrossRef

24.

J.L. Sánchez-Rojas, J. Hernando, A. Ababneh, U. Schmid, J. Olivares, M. Clement, E. Iborra, Advanced determination of piezoelectric properties of AlN thin films on silicon substrates. IEEE Int. Ultrason. Symposium Proc. (2008). https://doi.org/10.1109/ULTSYM.2008.0218CrossRef

25.

I.K. Bdikin, J. Gracio, R. Ayouchi, R. Schwarz, A.L. Kholkin, Local piezoelectric properties of ZnO thin films prepared by RF-plasma-assisted pulsed-laser deposition method. Nanotechnology 21, e235703 (2010)CrossRef

26.

S. Yu, Q. Rice, T. Neupane, B. Tabibi, Q. Lib, F.J. Seo, Piezoelectricity enhancement and bandstructure modification of atomic defect-mediated MoS₂ monolayer. Phys. Chem. Chem. Phys 19, 24271 (2017)CrossRef

27.

Sokrates T., Pantelides and Porter L.M. 2006 Si/SiO₂ and SiC/SiO₂ Interfaces for MOSFETs – Challenges and Advances. Mater. Sci. Forum 935–948

28.

Y. Feng, W.L. Li, D. Xu, Y.L. Qiao, Y. Yu, Y. Zhao, W.D. Fei, Defect engineering of lead-free piezoelectrics with high piezoelectric properties and temperature-stability. ACS Appl. Mater. Interfaces 8(14), 9231–9241 (2016)CrossRef

29.

I. Chinya, A. Pal, S. Sen, Polyglycolated zinc ferrite incorporated poly(vinylidene fluoride)(PVDF) composites with enhanced piezoelectric response. J. Alloys Compd. 722, 829 (2017)CrossRef

30.

A.R. Makhdoom, M.J. Akhtar, M.A. Rafiq, M.M. Hassan, Investigation of transport behaviour in Ba doped BiFeO₃. Ceram. Int. 38, 3829 (2012)CrossRef

Title: Boron doped SiC thin film on Silicon synthesized from polycarbosilane: a new lead free material for applications in piezosensors
Authors: Kusumita Kundu
Arnab Ghosh
Shewli Pratihar
Shiv Govind Singh
Tarun Kumar Kayal
Rajat Banerjee
Publication date: 13-09-2021
Publisher: Springer US
Published in: Journal of Materials Science: Materials in Electronics / Issue 20/2021
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI: https://doi.org/10.1007/s10854-021-06966-4

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