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17-02-2018 | Technical Paper

Carrier concentration of calcium zinc oxide with different calcium contents deposited through spray pyrolysis

Authors: Yi-Fu Lu, Wen-How Lan, Mu-Chun Wang, Ming-Chang Shih, Hsin-Hui Kuo, David Jui-Yang Feng, Yi-Jen Chiu, Yung-Jr Hung, Cheng-Fu Yang

Published in: Microsystem Technologies | Issue 10/2018

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Abstract

Calcium zinc oxide (CaZnO) films were prepared via spray pyrolysis deposition at 300 °C with zinc acetate and calcium acetate precursors of various calcium/zinc atomic ratios (CZ) in an aqueous solution. The surface morphology and crystalline structure of the samples were analyzed via scanning electron microscopy and X-ray diffraction. The size of the film grain increased with the CZ parameter, and the films exhibited a zinc oxide structure with preferred (101) orientations. The Ca content and the optical bandgap increased with the CZ parameter as well. Hall measurements were carried out to determine the carrier concentration and mobility. All films showed n-type conduction, with concentrations ranging from 1.7 × 10¹⁶ to 8.7 × 10¹⁶ cm⁻³ for the unintentionally doped CaZnO films. The concentration showed an increasing—flat behavior, and the mobility showed flat—decreasing behavior with an increase in the CZ parameter. Different deep-level states were identified by analyzing the photoluminescence, and these states dominate the carrier concentration of the CaZnO films prepared via spray pyrolysis.

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Title: Carrier concentration of calcium zinc oxide with different calcium contents deposited through spray pyrolysis
Authors: Yi-Fu Lu
Wen-How Lan
Mu-Chun Wang
Ming-Chang Shih
Hsin-Hui Kuo
David Jui-Yang Feng
Yi-Jen Chiu
Yung-Jr Hung
Cheng-Fu Yang
Publication date: 17-02-2018
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 10/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-018-3749-x

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