CF 3 + : An Alternative Primary Beam Source for the Sensitive Detection of Electropositive Elements in SIMS

Traditionally O₂+ has been used as the primary projectile for the sensitive detection of electropositive elements. Excellent secondary ion yields have been obtained particularly for those elements which can be completely oxidized and form strong ionic bonds with oxygen. Secondary ion yields, however, may decrease by several orders of magnitude for those elements (e.g., Cu, Ni, Zn, Ag) which are not forming strong ionic bonds under 0₂+ bombardment. One would expect that for these elementu, secondary ion yields may increase dramatically if bombarded with fluorine containing primary ions.