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Measurement Techniques
Published in: Measurement Techniques 11/2017

19-04-2017 | PHYSICOCHEMICAL MEASUREMENTS

Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis

Authors: A. Yu. Kuzin, V. B. Mityukhlyaev, P. A. Todua, M. N. Filippov

Published in: Measurement Techniques | Issue 11/2017

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Abstract

A phenomenological model is proposed for estimating the changes in the composition of a microscopic volume during low-voltage electron probe x-ray spectral microanalysis. The changes are caused by the thermal effect of the electron probe. Equations are derived which relate the metrological characteristics of low-voltage electron probe x-ray microanalysis to the thermodynamic characteristics of the sample and to the experimental conditions. These results make it possible to choose a priori an analysis mode that avoids errors induced by thermal instability of a test object.
previous article Vibroacoustic Monitoring of the Major Parameters of Electrical Discharge Machining

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Literature
1.
V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, et al., “Electron probe measurements of oxide fi lm thickness on silicon surfaces,” Izmer. Tekhn., No. 9, 13–16 (2015).
2.
M. N. Filippov, “Evaluating the thermal effect of an electron probe in scanning electron microscopy and x-ray microanalysis,” Izv. AN. Ser. Fizich., 57, No. 8, 165–171 (1993).
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L. Reimer, Image Formation in Low-Voltage Scanning Electron Microscopy, SPIE Press (1993), Vol. 12.
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E. I. Rau, E. N. Evstaf’eva, and M. V. Andrianov, “Mechanisms for charging of dielectrics under medium energy electron bombardment,” Fiz. Tv. Tela, 50, No. 4, 599–607 (2008).
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A. I. Efimov, L. P. Belorukova, I. V. Vasil’kova, and V. P. Chechev, Properties of Inorganic Compounds: Handbook, Khimiya, Leningrad (1983).
7.
A. Yu. Kuzin, M. A. Stepovich, V. B. Mityukhlyaev, et al., “Thermal effects during low-voltage electron probe x-ray spectral microanalysis with nanometer localization,” Izmer. Tekhn., No. 10, 27–29 (2016).
Metadata
Title
Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis
Authors
A. Yu. Kuzin
V. B. Mityukhlyaev
P. A. Todua
M. N. Filippov
Publication date
19-04-2017
Publisher
Springer US
Published in
Measurement Techniques / Issue 11/2017
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-017-1121-7

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