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Open Access 25-03-2023 | Research Article

Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments

Authors: Lei Xu, Kihong Park, Hong Lei, Pengzhan Liu, Eungchul Kim, Yeongkwang Cho, Taesung Kim, Chuandong Chen

Title: Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments
Authors: Lei Xu
Kihong Park
Hong Lei
Pengzhan Liu
Eungchul Kim
Yeongkwang Cho
Taesung Kim
Chuandong Chen
Publication date: 25-03-2023
Publisher: Tsinghua University Press
Published in: Friction / Issue 9/2023
Print ISSN: 2223-7690
Electronic ISSN: 2223-7704
DOI: https://doi.org/10.1007/s40544-022-0668-8

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