Top

Microsystem Technologies

Published in:

08-10-2016 | Technical Paper

Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes

Authors: Muhua Li, Jiahao Zhao, Zheng You, Guanghong Zhao

Published in: Microsystem Technologies | Issue 8/2017

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

This paper presents an approach for restoring force enhancement to radio frequency (RF) micro-electro-mechanical systems (MEMS) switch with stiction-recovery actuation mechanism. It is based on additional anti-stiction electrodes which are inserted to the coplanar waveguide (CPW) between the signal line and ground planes of a RF MEMS switch. If the movable membrane sticks to the substrate, electrostatic force, as extra restoring force, generated by the bias voltage between the anti-stiction electrodes can promise restoring action. The designed device with the proposed approach is fabricated. The restoring force of the fabricated device had reached 75, 177 and 520 μN by the bias voltages of 0, 10 and 20 V, respectively.

previous article Effects of pulse voltage on piezoelectric micro-jet for lubrication

next article An effective system-level vibration prediction analysis approach for data storage system chassis

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Angira M, Rangra K (2015) A low insertion loss, multi-band, fixed central capacitor based RF-MEMS switch. Microsyst Technol 21:2259CrossRef

Goldsmith C, Ehmke J, Malczewski A, Pillans B, Eshelman S, Yao Z, Brank J, Eberly M (2001) Lifetime characterization of capacitive RF MEMS switches. In: Sigmon B (ed) IEEE MTT-S International Microwave Symposium Digest, p 227–230

Gong S, Shen H, Barker NS (2011) A 60-GHz 2-bit switched-line phase shifter using SP4T RF-MEMS switches. IEEE T Microw Theory 59:894–900CrossRef

Jung TJ, Hyeon I, Baek C, Lim S (2012) Circular/linear polarization reconfigurable antenna on simplified RF-MEMS packaging platform in K-band. IEEE T Antenn Propag 60:5039–5045CrossRef

Kim CJ, Kim JY, Sridharan B (1998) Comparative evaluation of drying techniques for surface micromachining. Sens Actuators A (Physical) 64:17–26CrossRef

Kim M-W, Song Y, Yang H, Yoon J (2013) An ultra-low voltage mems switch using stiction-recovery actuation. J Micromech Microeng 23:45022–45027CrossRef

Lin C, Hsu C, Dai C (2015) Fabrication of a micromachined capacitive switch using the CMOS-MEMS technology. Micromachines 6:1645CrossRef

Mellé S, de Conto D, Dubuc D, Grenier K, Vendier O, Muraro J, Cazaux J, Plana R (2005) Reliability modeling of capacitive RF MEMS. IEEE T Microw Theory 53:3482–3488CrossRef

Pal J, Zhu Y, Lu J, Khan F, Dao D (2015) A novel three-state contactless RF micromachined switch for wireless applications. IEEE Electron Device Lett 36:1363CrossRef

Patil GD, Kolhare NR (2013) A review paper on RF MEMS switch for wireless communication. Int J Eng Trends Technol 4:195–198

Rebeiz GM, Patel CD, Han SK, Ko C, Ho KMJ (2013) The Search for a Reliable MEMS Switch? IEEE Microwave Mag 14:57–67CrossRef

Singh T, Rangra K (2015) Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz. Microsyst Technol 21:2387CrossRef

van Spengen WM (2012) Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations. J Micromech Microeng 22:074001CrossRef

SPST RF-MEMS switch dc to 12 GHz RMWS101 Radant MEMS datasheet. http://www.radantmems.com/radantmems.data/Library/Radant-Datasheet101_1.4.pdf. Accessed 6 Oct 2016

Yuan X, Peng Z, Hwang JCM, Forehand D, Goldsmith CL (2006) Acceleration of dielectric charging in RF MEMS capacitive switches. IEEE Trans Device Mater Reliab 6:556–563CrossRef

Zhu Y, Han L, Qin M, Huang Q (2014) Novel DC-40 GHz MEMS series-shunt switch for high isolation and high power applications. Sens Actuator A 214:101–110CrossRef

Title: Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction-recovery electrodes
Authors: Muhua Li
Jiahao Zhao
Zheng You
Guanghong Zhao
Publication date: 08-10-2016
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 8/2017
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-016-3134-6

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Other articles of this Issue 8/2017

Superior performance of a MEMS-based solid propellant microthruster (SPM) array with nanothermites

Size-dependent dynamic instability of double-clamped nanobeams under dispersion forces in the presence of thermal stress effects

The effects of optical and material properties on designing of a photonic crystal mechanical sensor

Characteristic analysis of unidirectional multi-driven and large stroke micro/nano-transmission platform

Nonlocal buckling analysis of functionally graded annular nanoplates in an elastic medium with various boundary conditions

Superharmonic resonance analysis of nonlocal nano beam subjected to axial thermal and magnetic forces and resting on a nonlinear elastic foundation