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Microsystem Technologies

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17-05-2019 | Technical Paper

Design of power control for ultrasonic cleaning systems based on hybrid PID/fuzzy methodology

Authors: Te-Jen Su, Kun-Liang Lo, Chia-Lin Chung, Jason Sheng-Hong Tsai, Jui-Chuan Cheng

Published in: Microsystem Technologies | Issue 4/2021

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Abstract

The high-power ultrasonic cleaning system is used in the manufacturing of clean product contaminants. The pulse density modulation (PDM) switching strategy is more efficient for cleaning the rough surface of equipment. This paper proposes a novel pulse density modulation duty cycle stepping (PDMDCS) method that incorporates a proportional–integral–derivative controller and fuzzy logic for the mechanical resonance frequency tracking and PDM duty cycle stepping for ultrasonic cleaning system power control. The experimental results show that based on the same hardware architecture, the proposed PDMDCS method increases the power control range and resolution of power control without adding more hardware that compares to mechanical resonance frequency control method.

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Title: Design of power control for ultrasonic cleaning systems based on hybrid PID/fuzzy methodology
Authors: Te-Jen Su
Kun-Liang Lo
Chia-Lin Chung
Jason Sheng-Hong Tsai
Jui-Chuan Cheng
Publication date: 17-05-2019
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 4/2021
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-019-04471-7

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