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Measurement Techniques
Published in: Measurement Techniques 3/2013

01-06-2013

Determination of the nonlinearity of capacitive sensors along the Z-axis of an atomic force microscope

Authors: A. V. Zablotskii, V. A. Sharonov, V. S. Bormashov, A. S. Baturin, P. A. Todua

Published in: Measurement Techniques | Issue 3/2013

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Abstract

The nonlinearity of capacitive sensors along the Z-axis of an atomic force microscope is investigated using test structures containing relief elements of height 300–1200 nm. The dependence of the results of height measurements on the value of the displacement of the tubular piezoelectric scanner over a range of 10–90% of the maximum possible value is established. It is shown that the nonlinearity of displacement and direction capacitive sensors, perpendicular to the surface being investigated, is 1.5–3%.
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Literature
1.
2.
V. L. Mironov, Principles of Scanning Probe Microscopy [in Russian], Izd. IFM Ross. Akad Nauk, Nizh. Novgorod (2004).
3.
E. G. Dalkova et al., Probe Microscopy Instruments and Methods [in Russian], Izd. Mozhaiskii Poligraf. Kombinat, Moscow (2011).
4.
Yu. A. Novikov, A. V. Rakov, and P. A. Todua, “Calibration of atomic force microscopes,” Izv. Ross. Akad Nauk, Ser. Fiz., 73, No. 4, 473–484 (2009).
5.
GOST R 8.635-2007, GSI. Scanning Probe Atomic Force Microscopes. Calibration Procedure.
6.
M. Suzuki, “Standardized procedure for calibrating height scales in atomic force microscopy on the order of 1 nm,” J. Vac. Sci. Technol. A: Vacuum, Surfaces, and Films, 14, No. 113, 1228–1232 (1996).ADSCrossRef
7.
Yu. A. Novikov et al., “A linear measure of the micrometer and nanometer ranges for scanning and atomic-force microscopy,” Trudy IOFAN, 62, 36–76 (2006).
Metadata
Title
Determination of the nonlinearity of capacitive sensors along the Z-axis of an atomic force microscope
Authors
A. V. Zablotskii
V. A. Sharonov
V. S. Bormashov
A. S. Baturin
P. A. Todua
Publication date
01-06-2013
Publisher
Springer US
Published in
Measurement Techniques / Issue 3/2013
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-013-0194-1

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