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Published in:
1984 | OriginalPaper | Chapter
Development of High Performance Ion Microanalyzer
Authors : E. Izumi, Y. Kato, M. Yano, Y. Arima, H. Tamura
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The ion microanalyzer (IMA) is the only surface analyzer which enables high sensitivity analysis of both surface and depth profile of various materials. Recently the IMA has been extensively utilized for quality control of diverse materials. Along with this, high sensitivity has been in increasing demand. The Model IMA-3 developed by Hitachi has realized an exceptionally high sensitivity, excellent resolution and ultrahigh vacuum owing to use of new ideas and technology.