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Measurement Techniques
Published in: Measurement Techniques 3/2013

01-06-2013 | NANOMETROLOGY

Distortion of the Profile of Surface Relief Elements of Single-Crystal Silicon Caused by Contamination in a Low-Voltage Scanning Electron Microscope

Authors: V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov, V. A. Sharonov

Published in: Measurement Techniques | Issue 3/2013

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Abstract

This is a study of the influence of contamination in an S-4800 scanning electron microscope at electron energies of 1 keV on the profile of the surface relief elements of an MShPS-2.0K standard gauge. The observed width of the upper base of the relief elements is found to increase with electron irradiation dose in different irradiation modes.
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Literature
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G. S. Zhdanov, “Rate of hydrocarbon contamination of objects in microprobe systems,” Poverkhnost, No. 1, 65–72 (1983).
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M. T. Postek, “An approach to the reduction of hydrocarbon contamination in the scanning electron microscope,” Scanning, 18, No. 4, 269–274 (1996).CrossRef
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M. Tortonese, Y. Guan, and J. Prochazka, “NIST-traceable calibration of CD-SEM magnification using a 100 nm pitch standard,” Proc. SPIE, 5038, 711–718 (2003).ADSCrossRef
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V. P. Gavrilenko et al., “Effect of contamination in an SEM on the profile of surface relief elements in the nanometer range,” Nano- Mikrosist. Tekhn., No. 2, 2–6 (2011).
5.
Yu. A. Novikov et al., “Method for linear measurements in the nanometre range,” Meas. Sci. Technol., 18, No. 2, 367–374 (2008).ADSCrossRef
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L. Reimer, Transmission Electron Microscopy: Physics of Image Formation and Microanalysis, Springer, NY (1997).CrossRef
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N. Silvis-Cividjan, C. W. Hagen, and P. Kruit, “Spatial resolution limits in electron-beam-induced deposition,” J. Appl. Phys., 98, 084905-1–084905-12 (2005).ADS
Metadata
Title
Distortion of the Profile of Surface Relief Elements of Single-Crystal Silicon Caused by Contamination in a Low-Voltage Scanning Electron Microscope
Authors
V. P. Gavrilenko
A. Yu. Kuzin
V. B. Mityukhlyaev
A. V. Rakov
P. A. Todua
M. N. Filippov
V. A. Sharonov
Publication date
01-06-2013
Publisher
Springer US
Published in
Measurement Techniques / Issue 3/2013
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-013-0186-1

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