Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Semiconductors
Published in: Semiconductors 6/2018

01-06-2018 | Fabrication, Treatment, and Testing of Materials and Structures

Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution

Authors: I. P. Kalinkin, S. A. Kukushkin, A. V. Osipov

Published in: Semiconductors | Issue 6/2018

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …
previous article Effect of Pulsed Gamma-Neutron Irradiation on the Photosensitivity of Si-Based Photodiodes with GeSi Nanoislands and Ge Epitaxial Layers
next article Laser-Induced Modification of the Surface of Ge2Sb2Te5 Thin Films: Phase Changes and Periodic-Structure Formation

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
Metadata
Title
Effect of Chemical Treatment of a Silicon Surface on the Quality and Structure of Silicon-Carbide Epitaxial Films Synthesized by Atom Substitution
Authors
I. P. Kalinkin
S. A. Kukushkin
A. V. Osipov
Publication date
01-06-2018
Publisher
Pleiades Publishing
Published in
Semiconductors / Issue 6/2018
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S1063782618060118

Other articles of this Issue 6/2018

Semiconductors 6/2018 Go to the issue

Carbon Systems

Effect of the Dehydrogenation of Graphane on Its Mechanical and Electronic Properties

Electronic Properties of Semiconductors

AC Electrical Conductivity of FeIn2Se4 Single Crystals

Electronic Properties of Semiconductors

Electrophysical Properties of p-Type Undoped and Arsenic-Doped Hg1 – xCd x Te Epitaxial Layers with x ≈ 0.4 Grown by the MOCVD Method

Carbon Systems

On the Possibility of the Propagation of Solitary Electromagnetic Waves in Bigraphene

Electronic Properties of Semiconductors

Contribution of Iron Clusters to the Magnetic Properties of Pb1 – yFe y Te Alloys

Spectroscopy, Interaction with Radiation

Rb1 – xCs x NO3 (x = 0.025, 0.05, 0.1) Single Crystals and Their High-Temperature X-Ray Study

Premium Partner

    Image Credits