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Published in:
01-10-2006
Effect of lubricant on tribo-induced phase transformation of Si
Published in: Tribology Letters | Issue 1/2006
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Abstract
Phase transformation behaviors of single crystal silicon lubricated by different fluids were investigated under the boundary lubricated regime. SEM and Raman micro-spectrometer results indicated that two major factors including viscosity and hydrogen bond of lubricant influence the phase transformation of single crystal silicon, and only the lubricant with relative high viscosity and weak hydrogen bond facilitates the phase transformation of Si-I→Si-II→a-Si (amorphous silicon) under boundary lubricated regime. As a result of the experiments reported here, pentadecane could be selected as a suitable lubricant to fabricate a smooth amorphous silicon surface.