Top

Published in:

2019 | OriginalPaper | Chapter

Electrostatic MEMS Switch with Vertical Beams and Body Biasing

Authors : Armin Bahmanyaran, Kian Jafari

Published in: Fundamental Research in Electrical Engineering

Publisher: Springer Singapore

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

One of the easiest and the most appropriate solution for fabricating MEMS switch is Electrostatic actuation. However, it requires large parallel plates which can take a large surface on the substrate wafer and thus an expensive fabrication cost. In this paper, an improved electrostatic MEMS switch is presented. The proposed design is carried out so that it minimizes the dimensions of the MEMS device. Simulation results are also done by COMSOL based on the proposed design.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

previous chapter Multi-band Rectangular Monopole Microstrip Antenna with Modified Feed Junction for Microwave Wireless Applications

next chapter Optimal Clustering of Nodes in Wireless Sensor Networks, Using a Gravitational Search Algorithm

Sinha N, Jones T, Guo Z, Piazza G (2010) Demonstration of low voltage and functionally complete logic operations using body-biased complementary and ultra-thin ALN piezoelectric mechanical switches. In: 2010 IEEE 23rd international conference on micro electro mechanical systems (MEMS), IEEE, pp 751–754

Akarvardar K, Eggimann C, Tsamados D, Chauhan YS, Wan GC, Ionescu AM, … Wong HSP (2008) Analytical modeling of the suspended-gate FET and design insights for low-power logic. IEEE Trans Electr Dev 55(1):48–59CrossRef

Akarvardar K, Elata D, Parsa R, Wan GC, Yoo K, Provine J, … Wong HS (2007) Design considerations for complementary nanoelectromechanical logic gates. In: Electron devices meeting, IEDM 2007, IEEE international, IEEE, pp 299–302

Tabib-Azar M, Venumbaka SR, Alzoubi K, Saab D (2010) 1 volt, 1 GHz NEMS switches. In: Sensors, 2010 IEEE, IEEE, pp 1424–1426

Nathanael R, Pott V, Kam H, Jeon J, Liu TJK (2009) 4-terminal relay technology for complementary logic. In: Electron devices meeting (IEDM), 2009 IEEE international, IEEE, pp 1–4

Alzoubi K, Saab DG, Tabib-Azar M (2010) Circuit simulation for nano-electro-mechanical switches VLSI circuits. In: 2010 53rd IEEE international midwest symposium on circuits and systems (MWSCAS), IEEE, pp 1177–1180

Chakraborty S, Chaudhuri AR, Bhattacharyya TK (2009) Design and analysis of MEMS cantilever based binary logic inverter. In: International conference on advances in computing, control and telecommunication technologies, ACT’09, pp 184–188

Title: Electrostatic MEMS Switch with Vertical Beams and Body Biasing
Authors: Armin Bahmanyaran
Kian Jafari
Publisher: Springer Singapore
Book: Fundamental Research in Electrical Engineering
Print ISBN: 978-981-10-8671-7

Electronic ISBN: 978-981-10-8672-4

Copyright Year: 2019
DOI: https://doi.org/10.1007/978-981-10-8672-4_78