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Fundamentals of Sputtering Read chapter Read first chapter

1984 | OriginalPaper | Chapter

Evaluation of Metal Interaction by Color Display SIMS Technique

Authors : Y. Mashiko, K. Tsutsumi, H. Koyama, S. Kawazu

Published in: Secondary Ion Mass Spectrometry SIMS IV

Publisher: Springer Berlin Heidelberg

Included in: Professional Book Archive

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The SIMS method is available to obtain the one-dimensional depth profile of elements and two-dimensional map of elements. However, metals used for manufacturing semiconductor devices can interact three-dimensionally to cause complex distribution of elements. And it is necessary to know the exact distribution of elements for obtaining highly reliable devices. This report describes the results of investigation on metal interaction observed by color display SIMS technique.

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Metadata
Title
Evaluation of Metal Interaction by Color Display SIMS Technique
Authors
Y. Mashiko
K. Tsutsumi
H. Koyama
S. Kawazu
Copyright Year
1984
Publisher
Springer Berlin Heidelberg
Book
Secondary Ion Mass Spectrometry SIMS IV

Print ISBN: 978-3-642-82258-2

Electronic ISBN: 978-3-642-82256-8

Copyright Year: 1984

DOI
https://doi.org/10.1007/978-3-642-82256-8_51