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Microsystem Technologies

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07-09-2018 | Technical Paper

Experimental investigation of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer

Authors: Hongliang Wang, Yifei Tong, Xiangjun Wang, Changde He, Chenyang Xue

Published in: Microsystem Technologies | Issue 12/2018

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Abstract

CMUT based on micro-electro-mechanical systems (MEMS) technology has a broad application prospects and has become the mainstream transducer for the new generation of ultrasound imaging systems. In this paper, based on the 16-element linear CMUT array chip that has been manufactured, an experimental system was built to investigate the radiation characteristic of CMUT. The influence of the parameters such as the DC bias voltage, the amplitude and period number of the AC excitation signal on the radiation signal is analyzed comprehensively. The experimental results are consistent with the results of the simulation analysis previously obtained by using the state equation-SIMULINK model. These experimental investigation and analysis results provide effective data support and reference for further optimization of design parameters and design of imaging systems, which lay a good application foundation.

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Title: Experimental investigation of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer
Authors: Hongliang Wang
Yifei Tong
Xiangjun Wang
Changde He
Chenyang Xue
Publication date: 07-09-2018
Publisher: Springer Berlin Heidelberg
Published in: Microsystem Technologies / Issue 12/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-018-4131-8

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