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Microsystem Technologies
Published in: Microsystem Technologies 4/2019

20-07-2018 | Technical Paper

Experimental study of fabricating a four-layers Cantor fractal microfluidic chip by CO2 laser system

Authors: Zeyang Wu, Xueye Chen, Zhongli Wu, Qijian Zhang, Qi Gao

Published in: Microsystem Technologies | Issue 4/2019

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Abstract

In this paper, we design a four-layers Cantor fractal microfluidic chip and study suitable materials and parameters to fabricate the microfluidic chip. The effect of changing the parameters of CO2 laser processing on different materials is studied by using CO2 laser processing method. Three kinds of materials are selected to process the microchannel. Then, three kinds of laser powers and three kinds of laser moving speeds are selected to form an orthogonal experiment. The better microchannels in the test range are compared by orthogonal experiment. Finally, the method of hot-pressing bonding is used to seal the four-layers Cantor fractal microfluidic chip. The experimental results show that CO2 laser processing plays an important role in the fabrication of microfluidic chips and it is a high efficiency and low-cost method. The combination method of CO2 laser processing and hot-pressing bonding provides a flexible and fast method for the complete fabrication of microfluidic chips.
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Literature
Caiazzo F, Curcio F, Daurelio G et al (2005) Laser cutting of different polymeric plastics (PE, PP and PC) by a CO2 laser beam. J Mater Process Technol 159(3):279–285CrossRef
Chen JJ, Shen CM, Ko YW (2013) Analytical study of a microfludic DNA amplification chip using water cooling effect. Biomed Microdevice 15(2):261–278CrossRef
Chen XY, Gao Q, Wang XL, Li XD (2016a) Experimental design and parameter optimization for laser three-dimensional (3-D) printing. Laser Eng 33:189–196
Chen X, Li T, Shen J (2016b) CO2 laser ablation of microchannel on PMMA substrate for effective fabrication of microfluidic chips. Int Polym Proc 31(2):233–238CrossRef
Chen X, Shen J, Zhou M (2016c) Rapid fabrication of a four-layer PMMA-based microfluidic chip using CO2-laser micromachining and thermal bonding. J Micromech Microeng 26(10):107001CrossRef
Chen X, Li T, Fu B (2016d) Surface roughness study on microchannels of CO2 laser fabricating PMMA-based microfluidic chip. Surf Rev Lett 24:1750017CrossRef
Chen XY et al (2017) Research on optimizing parameters of thermal bonding technique for PMMA microfluidic chip. Int Polym Proc 32(3):394–398CrossRef
Cheng E, Yin Z, Zou H, Chen L (2015) Surface modification-assisted bonding of 2D polymer-based nanofluidic devices. Microfluid Nanofluid 10(3):527–535CrossRef
Davim JP, Barricas N, Conceicao M et al (2008) Some experimental studies on CO2 laser cutting quality of polymeric materials. J Mater Process Technol 198(1–3):99–104CrossRef
Humayun M, Chow C-W, Young E (2018) Microfluidic lung airway-on-a-chip with arrayable suspended gels for studying epithelial and smooth muscle cell interactions. Lab Chip 18:1298–1309CrossRef
Jankowski P, Ogonczyk D, Kosinski A, Lisowski W, Garstecki P (2011) Hydrophobic modification of polycarbonate for reproducible and stable formation of biocompatible microparticles. Lab Chip 11:748–752CrossRef
Li H, Fan Y, Kodzius R et al (2012) Fabrication of polystyrene microfluidic devices using a pulsed CO2 laser system. Microsyst Technol 18(3):373–379CrossRef
Lim CT, Low HY, Ng JKK, Liu WT, Zhang Y (2009) Fabrication of three-dimensional hemispherical structures using photolithography. Microfluid Nanofluid 7:721–726CrossRef
Liu HB, Gong HQ (2009) Templateless prototyping of polydimethylsiloxane microfluidic structures using a pulsed CO2 laser. J Micromech Microeng 19:037002CrossRef
Liu Z, Shum HC (2013) Fabrication of uniform multi-compartment particles using microfludic electrospray technology for cell co-culture studies. Biomicrofluidics 7(4):044117CrossRef
Ogonczyk D, Wegrzyn J, Jankowski P, Dabrowski B, Garstecki P (2010) Bonding of microfluidic devices fabricated in polycarbonate. Lab Chip 10:1324–1327CrossRef
Qi H, Chen T, Yao LY, Zuo TC (2009) Micromachining of microchannel on the polycarbonate substrate with CO2 laser direct-writing ablation. Opt Laser Eng 47:594–598CrossRef
Rotting O, Ropke W, Becker H, Gartner C (2002) Polymer microfabrication technologies. Microsyst Technol 8:32–36CrossRef
Snakenborg Detlef, Klank Henning, Kutter Jörg P (2003) Microstructure fabrication with a CO2 laser system. J Micromech Microeng 14(2):182CrossRef
Yuan D, Das S (2007) Experimental and theoretical analysis of direct-write laser micromachining of polymethyl methacrylate by CO2 laser ablation. J Appl Phys 101(2):024901CrossRef
Zhou Bai Hua, Mahdavian SM (2004) Experimental and theoretical analyses of cutting nonmetallic materials by low power CO2-laser. J Mater Process Technol 146(2):188–192CrossRef
Metadata
Title
Experimental study of fabricating a four-layers Cantor fractal microfluidic chip by CO2 laser system
Authors
Zeyang Wu
Xueye Chen
Zhongli Wu
Qijian Zhang
Qi Gao
Publication date
20-07-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 4/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4060-6

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