FAB-SIMS Study for Analysis of Insulators

For the SIMS analysis of insulators, sample surface charging caused by primary ion bombardment should be prevented by, e.g., irradiation with electrons. The charging takes place by primary ion adhering on the sample surface and by emission of secondary electrons or secondary ions from the sample surface. Primary ion adherence and secondary electron emission are more significant in the charging than secondary ion emission, because the quantity of emitted secondary ions is very small, compared with secondary electrons and primary ions.