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Published in: Microsystem Technologies 3/2019

15-11-2018 | Technical Paper

Fabrication of large-area V-groove microstructures using gasbag-pressuring edge-irradiating UV imprinting

Authors: Yu-Yuan Huang, Kun-Cheng Ke, Sen-Yeu Yang

Published in: Microsystem Technologies | Issue 3/2019

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Abstract

UV imprinting has been one of the most productive replication techniques due to its low imprinting pressure and temperature. The conventional UV resin is cured by direct irradiation from the bottom. Space management and energy consumption become problems as the areas are getting larger and larger. Another problem is the uniformity of imprinting pressure, which is higher near the center with conventional platen-pressuring imprinting. In this study, we develop an innovative side-emitting UV-curing gasbag-pressuring imprinting mechanism for large area microstructure replication. An imprinting system based on such integration has been designed and implemented. V-groove microstructures has been imprinted onto a PMMA plate with dimensions of 380 mm × 230 mm × 3 mm for light enhancement. The optical performance and the profile of microstructures have been verified.

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Literature
go back to reference He M, Yuan XC, Ngo NQ et al (2003) Simple reflow technique for fabrication of a microlens array in solgel glass. Opt Lett 28:731–733CrossRef He M, Yuan XC, Ngo NQ et al (2003) Simple reflow technique for fabrication of a microlens array in solgel glass. Opt Lett 28:731–733CrossRef
go back to reference Klaassen EH, Petersen K, Noworolski JM, et al (1995) Silicon fusion bonding and deep reactive ion etching a new technology for microstructures. In: The 8th international conference on solid-state sensors and actuators, 1995 and eurosensors IX. Transducers’95. pp 556–559 Klaassen EH, Petersen K, Noworolski JM, et al (1995) Silicon fusion bonding and deep reactive ion etching a new technology for microstructures. In: The 8th international conference on solid-state sensors and actuators, 1995 and eurosensors IX. Transducers’95. pp 556–559
Metadata
Title
Fabrication of large-area V-groove microstructures using gasbag-pressuring edge-irradiating UV imprinting
Authors
Yu-Yuan Huang
Kun-Cheng Ke
Sen-Yeu Yang
Publication date
15-11-2018
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 3/2019
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4221-7

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