Fabrication of rigid stamp on a cylindrical substrate using hydrogen silsesquioxane/ZrO₂ nanoparticle composite material for roll-to-roll nanoimprinting process

In this study, a hydrogen silsesquioxane (HSQ) and zirconium oxide (ZrO₂, zirconia) nanoparticle composite was used for a nanopatterned roll stamp fabricated using the direct printing technique. HSQ, referred as a spin on glass (SOG) material have been used for direct printing process with polydimethylsiloxane mold. In order to enhance mechanical properties of SOG material without losing printable property, ZrO₂ nanoparticles were dispersed with HSQ solution. After direct printing process of composite material, annealing process was done to convert polymeric HSQ structure into SiO₂ in order to enhance mechanical properties. We evaluate the chemical, optical and mechanical properties of the HSQ/ZrO₂ composite by FT-IR, a refractive index measurement, a nanoindentation test and a pencil adhesion test. At the mechanical property tests, the composite material shows a high hardness value and good adhesion properties with glass substrate. Considering the composite material properties, it is suitable for use as a master cylindrical stamp in a roll-to-roll process.