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Microsystem Technologies
Published in: Microsystem Technologies 8-9/2010

01-08-2010 | Technical Paper

First automated production line for X-ray-LIGA (FELIG) is brought on line

Authors: Lothar Hahn, Georg Schwartz, Volker Saile, Joachim Schulz

Published in: Microsystem Technologies | Issue 8-9/2010

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Abstract

The project FELIG sets a milestone in X-ray-LIGA technology. The first automated LIGA production is brought online. The units have been implemented at the synchrotron source ANKA at Forschunszentrum Karlsruhe. They are linked via a conveyor line and controlled by a superior software system. Other process steps as resist technique have been partly automated. The whole process has been adapted to a wafer format of 6″. Automation and enlargement of formats will reduce production costs for LIGA components and help LIGA technique for industrial breakthrough.
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Literature
Chung SJ, Hein H, Mohr J, Pantenburg FJ, Schulz J, Wallrabe U (2000) LIGA technology today and its industrial applications. Proc SPIE 4194
Hesselbach J, Raatz A, Wrege J, Herrmann H, Weule H, Fleischer J, Buchholz C, Tritschler H, Knoll M, Elsner J, Klocke F, Weck M, von Bodenhausen J, von Klitzing A (2003) Investigation on the international state of the art of micro production technology. In: Proceedings of the Euspen international topical conference, Aachen, 19–20 Mai 2003. Voerde, Rhiem Druck, 11–18
Meyer P, Schulz J, Hahn L (2003) DoseSim: Microsoft-Windows graphical user interface for using synchrotron X-ray exposure and subsequent development in the LIGA process. Rev Sci Instrum 74:1113–1119
Meyer P, Saile V, Schulz J, Klein O, Arendt M (2008) Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process. Int J Technol Transf Commer 7:362–370
Metadata
Title
First automated production line for X-ray-LIGA (FELIG) is brought on line
Authors
Lothar Hahn
Georg Schwartz
Volker Saile
Joachim Schulz
Publication date
01-08-2010
Publisher
Springer-Verlag
Published in
Microsystem Technologies / Issue 8-9/2010
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-009-0953-8

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