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Published in:
2012 | OriginalPaper | Chapter
Functional Realization: Electrostatic Transducers
Authors : Prof. Dr. techn. Klaus Janschek, Dr. Kristof Richmond
Published in: Mechatronic Systems Design
Publisher: Springer Berlin Heidelberg
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Electrostatics represents the most ancient known manifestation of electricity, but it has only been since the end of the 20th century that this principle has achieved true engineering significance as a key component of
microelectromechanical systems
(
MEMS
). Due to the physically-constrained, micro-scale force generation available from this principle, its many possible sensor and actuator applications can also only be realized at the micro- scale. Electrostatic transducers are particularly attractive due to the relative ease of their construction. All they require is some conductive materials for the electrodes.