Functional Response of NiTi Elements for Smart Micro-actuation Applications

Shape memory alloys (SMAs) can be considered a good candidate for actuation applications in the current micro-technology field. In the micro-scale, the temporal response of the SMA actuators can be improved, because of faster cooling during the austenite-martensite transformation. One of the most investigated geometries for this purpose has been the snake-like arrangement, which allows high strokes with considerable forces to be obtained. In this work, SMA elements for micro-actuators were patterned by laser machining in a snake-like shape. Subsequent surface chemical etching was adopted to improve the functional properties of the micro-elements. Calorimetric analysis and thermo-mechanical response of 90 μm thick SMA elements were reported for the evaluation of their functional performances. Moreover, the effect of post-thermal treatment and grain orientation were also evaluated on the final performances.