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Open Access 01-11-2008

Improved Uniformity and Electrical Performance of Continuous-Wave Laser-Crystallized TFTs Using Metal-Induced Laterally Crystallized Si Film

Authors: Chih-Pang Chang, YewChung Sermon Wu

Title: Improved Uniformity and Electrical Performance of Continuous-Wave Laser-Crystallized TFTs Using Metal-Induced Laterally Crystallized Si Film
Authors: Chih-Pang Chang
YewChung Sermon Wu
Publication date: 01-11-2008
Publisher: Springer US
Published in: Journal of Electronic Materials / Issue 11/2008
Print ISSN: 0361-5235
Electronic ISSN: 1543-186X
DOI: https://doi.org/10.1007/s11664-008-0536-y