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2018 | OriginalPaper | Chapter

Integrated Vacuum Microsensor Systems in CMOS Technology

Authors : Jiaqi Wang, Zhenan Tang

Published in: Micro Electro Mechanical Systems

Publisher: Springer Singapore

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Abstract

Vacuum sensor is a type of pressure sensor and widely used in the vacuum measurement. In this chapter, besides the traditional vacuum sensors, the micro-vacuum sensors based on silicon micromachining technique are introduced. What is more, the CMOS-compatible Pirani and thermal ionization vacuum sensors are discussed in details. The CMOS-compatible process is important for sensor fabrication, including suspending structure, wet etching, dry etching, etc. The influence of sensor to the circuit should also be considered, such as the thermal influence. The sensor system can integrate the sensor with voltage reference, signal sampling circuit, A/D converter (ADC), central processing unit (CPU), and interface circuit. This technique will generate the vacuum sensor system with sensor and its control system monolithically, which is convenient for applications. The integrated vacuum sensor system has the advantages of small size, volume, and weight, which would have its potential applications, such as the space exploration, micro-packaging, etc.

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Abbott P, Jabour Z (2011) Vacuum technology considerations for mass metrology. J Res Nat Inst Stand Technol 116(4):689CrossRef

Abbott P, Looney J, Mohan P (2005) The effect of ambient temperature on the sensitivity of hot-cathode ionization gauges. Vacuum 77(2):217–222CrossRef

Bower CA, Gilchrist KH, Piascik JR, Stoner BR, Natarajan S, Parker CB, Wolter SD, Glass JT (2007) On-chip electron-impact ion source using carbon nanotube field emitters. Appl Phys Lett 90(12):124102CrossRef

Chae J, Stark BH, Najafi K (2005) A micromachined Pirani gauge with dual heat sinks. IEEE Trans Adv Packag 28(4):619–625CrossRef

Dong C, Myneni GR (2004) Carbon nanotube electron source based ionization vacuum gauge. Appl Phys Lett 84(26):5443–5445CrossRef

Dong K-Y, Lee YD, Kang BH, Choi J, Ju B-K (2013) Design of a multi-walled carbon nanotube field emitter with micro vacuum gauge. Nanoscale Res Lett 8(1):1CrossRef

Ellett A, Zabel RM (1931) The pirani gauge for the measurement of small changes of pressure. Phys Rev 37:1102–1111CrossRef

Johnson L, Young R, Montgomery E, Alhorn D (2011) Status of solar sail technology within NASA. Adv Space Res 48(11):1687–1694CrossRef

Jousten K (2008) Handbook of vacuum technology. Wiley, Weinheim

Kawano T, Suter M, Cho C, Chiamori H, Lin L (2007) Single carbon nanotube pirani gauge by local synthesis. In: TRANSDUCERS 2007-2007 international solid-state sensors, actuators and microsystems conference. IEEE, pp 1015–1018

Khosraviani K, Leung AM (2009) The nanogap Pirani—a pressure sensor with superior linearity in an atmospheric pressure range. J Micromech Microeng 19(4):045007CrossRef

Klaassen EH (1996) Micromachined instrumentation systems. PhD dissertation, Stanford University

Klaassen EH, Kovacs GT (1997) Integrated thermal-conductivity vacuum sensor. Sens Actuators A 58(1):37–42CrossRef

Lee J, Wright TL, Abel MR, Sunden EO, Marchenkov A, Graham S, King WP (2007) Thermal conduction from microcantilever heaters in partial vacuum. J Appl Phys 101(1):014906CrossRef

Mastrangelo CH, Muller RS (1991) Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor. IEEE J Solid State Circuits 26(12):1998–2007CrossRef

Mitchell J, Lahiji GR, Najafi K (2008) An improved performance poly-Si Pirani vacuum gauge using heat-distributing structural supports. J Microelectromech Syst 17(1):93–102CrossRef

Paul O, Baltes H (1995) Novel fully CMOS-compatible vacuum sensor. Sens Actuators A 1(46):143–146CrossRef

Shie JS, Chou BC, Chen YM (1995) High performance Pirani vacuum gauge. J Vac Sci Technol A 13(6):2972–2979CrossRef

Sun C (1999). Microengineered sensor devices with field emission electron sources. PhD dissertation, New Jersey Institute of Technology

Topalli ES, Topalli K, Alper SE, Serin T, Akin T (2009) Pirani vacuum gauges using silicon-on-glass and dissolved-wafer processes for the characterization of MEMS vacuum packaging. IEEE Sensors J 9(3):263–270CrossRef

Wang J, Tang Z (2009) A fully CMOS-compatible micro-Pirani gauge based on a constant current. In: IEEE 22nd international conference on, Micro electro mechanical systems, MEMS. IEEE, pp 829–832

Wang JQ, Yu J (2015) Fabrication process and electro-thermal modeling for the cathode of the CMOS-compatible hot-filament vacuum gauge. Key Eng Mater 645:836–840CrossRef

Wang JQ, Tang ZA, Li JF, Zhang FT (2009) A MicroPirani pressure sensor based on the tungsten microhotplate in a standard CMOS process. Ieee T Ind Electron 56(4):1086–1091CrossRef

Wang J, Tang Z, Li J (2011) Tungsten-microhotplate-array-based pirani vacuum sensor system with on-chip digital front-end processor. J Microelectromech Syst 20(4):834–841CrossRef

Wilfert S (2004) Miniaturized vacuum gauges. J Vac Sci Technol A 22(2):309–320CrossRef

Williams KR (1997) Micromachined hot-filament vacuum devices. PhD dissertation, UC Berkeley

Williams KR, Muller RS (1997) Microtnachined hot-filament ionization pressure sensor and magnetometer. In: 1997 lnternational conference on solid-state sensors and actuators (Transducers 97′), vol 1000. Chicago, pp 1249–1252

Zhang F, Tang Z, Yu J, Jin R (2006) A micro-Pirani vacuum gauge based on micro-hotplate technology. Sens Actuators A 126(2):300–305CrossRef

Title: Integrated Vacuum Microsensor Systems in CMOS Technology
Authors: Jiaqi Wang
Zhenan Tang
Publisher: Springer Singapore
Book: Micro Electro Mechanical Systems
Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-981-10-5945-2_10