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2018 | OriginalPaper | Chapter

Micro Thermal Flow Sensor

Author : Rong Zhu

Published in: Micro Electro Mechanical Systems

Publisher: Springer Singapore

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Abstract

Measurement of fluid mechanics is very important in various fields, and flow sensors have been widely applied to execute accurate and efficient measurements. Compared with other sensing principle, thermal flow sensors are based on convective heat transfer and take merits of simple structure and easy use and thus offer a practical solution for various fluidics applications. In this chapter, we describe mainly hot-film anemometer fabricated on polyimide substrate. Hot-film or hot-wire anemometer utilizes a thermal element that serves as both a joule heater and a temperature sensor. We introduce the principle of thermal flow sensing, design and fabrication of the micro hot-film flow sensor, the measurement methodology, and application cases by using the micro hot-film flow sensors.

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Title: Micro Thermal Flow Sensor
Author: Rong Zhu
Publisher: Springer Singapore
Book: Micro Electro Mechanical Systems
Print ISBN: 978-981-10-5944-5

Electronic ISBN: 978-981-10-5945-2

Copyright Year: 2018
DOI: https://doi.org/10.1007/978-981-10-5945-2_19