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Published in:
01-06-2011 | Technical Article---Peer-Reviewed
Interpreting the Evidence: Elemental Analysis in the SEM
Published in: Journal of Failure Analysis and Prevention | Issue 3/2011
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Abstract
Failure investigation often involves artifact examination in a scanning electron microscope (SEM). In turn, SEM examination often includes elemental analysis of the surfaces examined, e.g., deposits, a fracture surface, a polished cross section, or other surface. However, elemental data can be misinterpreted without a basic understanding of how they are obtained and the inherent limitations and assumptions of the methods employed. Recent experiences of the authors reinforce the importance of these points.