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Published in:
1984 | OriginalPaper | Chapter
Ion Gun Systems for Submicron SIMS
Author : H. Liebl
Published in: Secondary Ion Mass Spectrometry SIMS IV
Publisher: Springer Berlin Heidelberg
Included in: Professional Book Archive
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The possibility of submicron scanning ion microscopy was demonstrated long ago [1, 2], Its potential use for SIMS applications has been the subject of theoretical and experimental investigations in a number of laboratories [3–12]. With the growing importance of submicron devices this instrumentation will surely have a future.