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Published in: Glass and Ceramics 1-2/2020

25-05-2020

Laser Drilling of Microholes in Glass

Authors: V. S. Kondratenko, V. V. Kadomkin, Lu Hung-Tu, A. S. Naumov, I. E. Velikovskii

Published in: Glass and Ceramics | Issue 1-2/2020

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Abstract

The results of the successful laser drilling of 30 – 200 μm in diameter microholes in glass ranging in thickness from 0.1 to 0.8 mm are reported. High-quality holes together with high process performance are achieved by using in the hole piercing process an immersion cooling liquid in contact with the bottom surface of the glass.

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Literature
1.
go back to reference L. A. Hof and Jana Abou Ziki, Micro-Hole Drilling on Glass Substrates: A Review, Department of Mechanical & Industrial Engineering, Concordia University, Bharti School of Engineering, Laurentian University, Sudbury (2017). L. A. Hof and Jana Abou Ziki, Micro-Hole Drilling on Glass Substrates: A Review, Department of Mechanical & Industrial Engineering, Concordia University, Bharti School of Engineering, Laurentian University, Sudbury (2017).
2.
go back to reference CO2-Laser Drilling of through Glass Vias (TGVs), Fraunhofer Institute for Reliability and Micro-Integration IZM; URL:http:__www.izm.fraunhofer.de (accessed on 7 February 2017). CO2-Laser Drilling of through Glass Vias (TGVs), Fraunhofer Institute for Reliability and Micro-Integration IZM; URL:http:__www.izm.fraunhofer.de (accessed on 7 February 2017).
3.
go back to reference L. Brusberg, M. Queisser, C. Gentsch, et al., “Advances in CO2-laser drilling of glass substrates,” Phys. Proc., 39 (2012), Fraunhofer Institute for Reliability and Micro-Integration IZM. L. Brusberg, M. Queisser, C. Gentsch, et al., “Advances in CO2-laser drilling of glass substrates,” Phys. Proc., 39 (2012), Fraunhofer Institute for Reliability and Micro-Integration IZM.
4.
go back to reference D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys. A. Mater. Sci. Proc., 79, 605 – 612 (2004).CrossRef D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys. A. Mater. Sci. Proc., 79, 605 – 612 (2004).CrossRef
5.
go back to reference M. Castillejo, P. M. Ossi, and L. Zhigilei, Lasers in Materials Science, Springer, Cham (2014).CrossRef M. Castillejo, P. M. Ossi, and L. Zhigilei, Lasers in Materials Science, Springer, Cham (2014).CrossRef
6.
go back to reference E. D. Vaks, M. N. Milen’kii, and L. G. Saprykin, Practice of Precision Laser Processing [in Russian], Tekhnosfera, Moscow (2013). E. D. Vaks, M. N. Milen’kii, and L. G. Saprykin, Practice of Precision Laser Processing [in Russian], Tekhnosfera, Moscow (2013).
7.
go back to reference A. Kruusing, Underwater and Water-Assisted Laser Processing. Pt 2. Etching, Cutting and Rarely Used Method, Tallinn Technical University, Tallinn (2002). A. Kruusing, Underwater and Water-Assisted Laser Processing. Pt 2. Etching, Cutting and Rarely Used Method, Tallinn Technical University, Tallinn (2002).
8.
go back to reference Reo Murakami, Hiroyuki Nakagawa, and Shigeki, “Water-assisted laser drilling for miniature internal thread in glass and evaluation of its strength,” Matsuo Department of Mechanical Engineering, Shibaura Institute of Technology; J. Laser Micro Nanoeng., 12(3), 203 – 206 (2017). Reo Murakami, Hiroyuki Nakagawa, and Shigeki, “Water-assisted laser drilling for miniature internal thread in glass and evaluation of its strength,” Matsuo Department of Mechanical Engineering, Shibaura Institute of Technology; J. Laser Micro Nanoeng., 12(3), 203 – 206 (2017).
9.
go back to reference H. Huang, L. Yang, and J. Liu, “Micro-hole drilling and cutting using femtosecond fiber laser,” Opt. Eng., 5 (2014). H. Huang, L. Yang, and J. Liu, “Micro-hole drilling and cutting using femtosecond fiber laser,” Opt. Eng., 5 (2014).
10.
go back to reference A. A. Aleksandrov and B. A. Grigor’ev, Tables of the Thermophysical Properties of Water and Water Vapor [in Russian], Izd. MEI, Moscow (1999). A. A. Aleksandrov and B. A. Grigor’ev, Tables of the Thermophysical Properties of Water and Water Vapor [in Russian], Izd. MEI, Moscow (1999).
11.
go back to reference L. M. Ozherelkova and E. S. Savin, “Temperature dependence of the nonstationary thermal conductivity of solids,” Ross. Tekh. Zh., 7(2), 49 – 60 (2019). L. M. Ozherelkova and E. S. Savin, “Temperature dependence of the nonstationary thermal conductivity of solids,” Ross. Tekh. Zh., 7(2), 49 – 60 (2019).
Metadata
Title
Laser Drilling of Microholes in Glass
Authors
V. S. Kondratenko
V. V. Kadomkin
Lu Hung-Tu
A. S. Naumov
I. E. Velikovskii
Publication date
25-05-2020
Publisher
Springer US
Published in
Glass and Ceramics / Issue 1-2/2020
Print ISSN: 0361-7610
Electronic ISSN: 1573-8515
DOI
https://doi.org/10.1007/s10717-020-00233-4

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