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Published in: Journal of Materials Science 10/2012

01-05-2012

Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures

Authors: D. Peruško, S. Petrović, J. Kovač, Z. Stojanović, M. Panjan, M. Obradović, M. Milosavljević

Published in: Journal of Materials Science | Issue 10/2012

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Abstract

In this study, multilayered structures consisting of eight (Al/Ti) bilayers deposited by d.c. ion sputtering onto Si (100) wafers, to a total thickness of ~300 nm were treated in air with a picosecond-pulsed Nd:YAG laser in a defocused regime. Irradiation was done with 200 successive pulses, at 1,064-nm wavelength, energy per pulse 15 mJ, the incidence angle of ~45°, covering an area of 2-mm in diameter. The samples were analyzed by scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. It was found that laser irradiation-induced melting and a progressed Al–Ti nanoalloying within the top four bilayers (up to a depth of ~150 nm), while the underlying part of the multilayered structure remained intact. Another interesting result is that of a regularly rippled surface topography (~1.4-μm period and 100-nm amplitude) developed throughout the zone of the melted and reacted material.

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Metadata
Title
Laser-induced formation of intermetallics in multilayered Al/Ti nano-structures
Authors
D. Peruško
S. Petrović
J. Kovač
Z. Stojanović
M. Panjan
M. Obradović
M. Milosavljević
Publication date
01-05-2012
Publisher
Springer US
Published in
Journal of Materials Science / Issue 10/2012
Print ISSN: 0022-2461
Electronic ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-012-6311-8

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