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Published in:
Exploring the Possibilities of Laser Interference Patterning for the Rapid Fabrication of Periodic Arrays on Macroscopic Areas Read chapter Read first chapter

2011 | OriginalPaper | Chapter

Laser Micromachining

Authors : Udo Klotzbach, Andrés Fabián Lasagni, Michael Panzner, Volker Franke

Published in: Fabrication and Characterization in the Micro-Nano Range

Publisher: Springer Berlin Heidelberg

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Abstract

Over the recent years, the laser technology and its potentials have been exciting laser manufacturers as well as researchers and industrial users. Lasers with their excellent beam quality promised noticeable advantages and improvements in high precision and material processing at the microscale. Besides the excellent beam quality there are more advantages of the laser technology such as compact installation size, high laser efficiency, moderate system price and easy to be integrated. This chapter describes the results of different short pulse laser systems in a wide field of applications, showing specific advantages in practical applications. Typical applications of laser micro machining have been chosen including drilling, cutting, structuring, lateral material removal as well as marking.

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previous chapter Exploring the Possibilities of Laser Interference Patterning for the Rapid Fabrication of Periodic Arrays on Macroscopic Areas
next chapter Patterning and Optical Properties of Materials at the Nanoscale
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Metadata
Title
Laser Micromachining
Authors
Udo Klotzbach
Andrés Fabián Lasagni
Michael Panzner
Volker Franke
Copyright Year
2011
Publisher
Springer Berlin Heidelberg
Book
Fabrication and Characterization in the Micro-Nano Range

Print ISBN: 978-3-642-17781-1

Electronic ISBN: 978-3-642-17782-8

Copyright Year: 2011

DOI
https://doi.org/10.1007/978-3-642-17782-8_2

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