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Microsystem Technologies
Published in: Microsystem Technologies 6/2018

08-12-2017 | Technical Paper

Laser speckle reduction by a hybrid MEMS diffuser device with continuous height profile

Authors: Qiaoming You, Dayong Qiao, Xiumin Song, Changfeng Xia, Yanan Zhang

Published in: Microsystem Technologies | Issue 6/2018

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Abstract

The hybrid MEMS diffuser device based on Si wafer and fire resistant 4 printed circuit board (FR-4 PCB) was designed in order to obtain a low-cost device with large aperture for laser speckle reduction. Reflective diffuser with continuous height profile was fabricated on Si wafer by micromachining technology. FR-4 PCB was used to fabricate the vibrating structure by printed circuit board (PCB) manufacturing process. The hybrid MEMS diffuser device including diffuser and vibrating structure was driven to vibrate by electromagnetic force with a frequency of 66 Hz. The laser speckle reduction of 71.8% was obtained for the MEMS diffuser device.
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Metadata
Title
Laser speckle reduction by a hybrid MEMS diffuser device with continuous height profile
Authors
Qiaoming You
Dayong Qiao
Xiumin Song
Changfeng Xia
Yanan Zhang
Publication date
08-12-2017
Publisher
Springer Berlin Heidelberg
Published in
Microsystem Technologies / Issue 6/2018
Print ISSN: 0946-7076
Electronic ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-017-3621-4

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