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2018 | OriginalPaper | Chapter

58. Low-Energy Electron Microscope

Author : H. Hibino

Published in: Compendium of Surface and Interface Analysis

Publisher: Springer Singapore

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Abstract

Low-energy electron microscopy (LEEM) is a projection-type microscopy technique collecting low-energy (typically 1–100 eV) electrons backscattered from the samples for imaging [1].

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Literature
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go back to reference Hibino, H., Kageshima, H., Maeda, F., Nagase, M., Kobayashi, Y., Yamaguchi, H.: Microscopic thickness determination of thin graphite films formed on SiC from quantized oscillation in reflectivity of low-energy electrons. Phys. Rev. B 77, 075413 (2008)CrossRef Hibino, H., Kageshima, H., Maeda, F., Nagase, M., Kobayashi, Y., Yamaguchi, H.: Microscopic thickness determination of thin graphite films formed on SiC from quantized oscillation in reflectivity of low-energy electrons. Phys. Rev. B 77, 075413 (2008)CrossRef
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Metadata
Title
Low-Energy Electron Microscope
Author
H. Hibino
Copyright Year
2018
Publisher
Springer Singapore
DOI
https://doi.org/10.1007/978-981-10-6156-1_58

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