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2014 | OriginalPaper | Chapter

MEMS Flow Sensor Based on a Sigma–Delta Modulator Embedded in the Thermal Domain

Authors : M. Piotto, A. N. Longhitano, F. Del Cesta, P. Bruschi

Published in: Sensors and Microsystems

Publisher: Springer International Publishing

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Abstract

A system for gas flow measurement, based on MEMS flow sensing microstructures and a sigma–delta interface, is described. The sensing structures consist of double-heater differential microcalorimeters, obtained by means of a post-processing procedure applied to chips fabricated using the Bipolar-CMOS-DMOS process BCD6s of STMicroelectronics. Part of the sigma–delta modulator is implemented in the thermal domain by exploiting the versatility of the double-heater sensing structures. The measurements performed in nitrogen flow prove the effectiveness of the proposed approach.

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P. Bruschi, M. Dei, M. Piotto, A Low-Power 2-D Wind Sensor Based on Integrated Flow Meters, IEEE Sensors Journal. 9(12), 1688-1696 (2009)CrossRef

M. Piotto, M. Dei, F. Butti, G. Pennelli, P. Bruschi. Smart Flow Sensor With On-Chip CMOS Interface Performing Offset and Pressure Effect Compensation. IEEE Sensors Journal, 12(12), 3309-3317 (2012)CrossRef

K.K.A. Makinwa, J.H. Huijsing A smart wind sensor using thermal sigma-delta modulation techniques. Sensors and Actuators A, 97-98, 15-20 (2002).CrossRef

P. Bruschi, M. Piotto, Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss. Micromachines, 3, 295-314 (2012)CrossRef

P. Bruschi, M. Dei, M. Piotto. An Offset Compensation Method With Low Residual Drift for Integrated Thermal Flow Sensors. IEEE Sensor Journal, 11(5), 1162-1168 (2011)CrossRef

M. Dijkstra, T. S. J. Lammerink, M. J. de Boer, J. W. Berenschot, R.J. Wiegerink, and M. Elwenspoek. Low-drift flow sensor with zero offset thermopile-based power feedback. Proc. of DTIP 2008, Apr. 9–11 2008, Nice (France), 247–250 (2008)

Title: MEMS Flow Sensor Based on a Sigma–Delta Modulator Embedded in the Thermal Domain
Authors: M. Piotto
A. N. Longhitano
F. Del Cesta
P. Bruschi
Publisher: Springer International Publishing
Book: Sensors and Microsystems
Print ISBN: 978-3-319-00683-3

Electronic ISBN: 978-3-319-00684-0

Copyright Year: 2014
DOI: https://doi.org/10.1007/978-3-319-00684-0_58