8. Metallisierung und Kontakte

2019
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Author: Ulrich Hilleringmann
Published in: Silizium-Halbleitertechnologie
Publisher: Springer Fachmedien Wiesbaden

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Zusammenfassung

Der Metall-Halbleiterkontakt weist eine stark vom Material und von der Prozessführung abhängige Strom-Spannungscharakteristik auf, die sich durch Einführung von Kontaktschichten optimieren lässt. Es folgt die Vorstellung von Oberflächenplanarisierungen für die Mehrlagenverdrahtung, zudem werden die Zuverlässigkeit von Aluminium als Leiterbahn und die Kupfermetallisierung behandelt.

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Metadata
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Title: Metallisierung und Kontakte
Author: Ulrich Hilleringmann
Publisher: Springer Fachmedien Wiesbaden
Book: Silizium-Halbleitertechnologie
Print ISBN: 978-3-658-23443-0

Electronic ISBN: 978-3-658-23444-7

Copyright Year: 2019
DOI: https://doi.org/10.1007/978-3-658-23444-7_8

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