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2010 | OriginalPaper | Chapter

5. Microfluidic Packaging Process

Authors : Ebrahim Ghafar-Zadeh, Mohamad Sawan

Published in: CMOS Capacitive Sensors for Lab-on-Chip Applications

Publisher: Springer Netherlands

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Abstract

A CMOS-based LoC system would require efficient microfluidic packaging to protect the circuitry from the biological and chemical analytes, as well as the external environment. Microfluidic packaging is also critical to direct the fluids towards the embedded sensors or actuators for analysis. Ideally, these microfluidic packaging components, including micro-channels, -chambers, -fittings, -valves and -pumps should be performed using a low temperature process with reliable hermetic bonding [278]. The leakage of analytes (especially of charged molecules, as is the case with many bioanalytes) from microfluidic components may increase the parasitic capacitances or resistances and thus affect the circuit characteristics.

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Title: Microfluidic Packaging Process
Authors: Ebrahim Ghafar-Zadeh
Mohamad Sawan
Publisher: Springer Netherlands
Book: CMOS Capacitive Sensors for Lab-on-Chip Applications
Print ISBN: 978-90-481-3726-8

Electronic ISBN: 978-90-481-3727-5

Copyright Year: 2010
DOI: https://doi.org/10.1007/978-90-481-3727-5_5