Skip to main content
Top

2018 | OriginalPaper | Chapter

4. Modeling Semiconductor Crystal Growth Under Electromagnetic Fields

Author : Sadik Dost

Published in: Generalized Models and Non-classical Approaches in Complex Materials 2

Publisher: Springer International Publishing

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Growth of semiconductor single crystals under electric and magnetic fields is of interest to increase and better control of crystal growth rate, to suppress and control the adverse effect of natural convection and to obtain better mixing in the growth melt (liquid solution) for better crystal uniformity, which all are favorable conditions for a prolonged growth of high quality crystals. To this end, in parallel to well-designed experiments, modeling is essential to shed light on various aspects of these growth processes and also to better understand the transport phenomena involved. In this article the models developed over the years, mostly based on Professor Gerard Maugin’s well-known contributions to “electromagnetic interactions”, are briefly presented for “solution growth” conducted under electric and magnetic fields. Basic and constitutive equations of a binary electromagnetic continuum mixture are specialized for two important solution growth techniques—Liquid Phase Electroepitaxy (LPEE) and Travelling Heater Method (THM). As an application, an LPEE growth of GaAs bulk crystals under a strong static magnetic field is considered. Experimental results, that have shown that the growth rate under an applied static magnetic field is also proportional to the applied magnetic field and increases with the field intensity level, are predicted from these models. The contribution of a third-order material constant in LPEE is also predicted from these models. The prediction of increasing growth rate in THM growth under rotating magnetic fields from modeling was verified by experiments.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
1.
go back to reference Eringen, A.C., Maugin, G.A.: Electrodynamics of Continua, vol. I and II. Springer, New York (1989) Eringen, A.C., Maugin, G.A.: Electrodynamics of Continua, vol. I and II. Springer, New York (1989)
2.
go back to reference Bowen, R.M.: Theory of mixtures. In: Eringen, A.C. (ed.) Continuum Physics, vol. 3, pp. 1–127. Academic Press, New York Bowen, R.M.: Theory of mixtures. In: Eringen, A.C. (ed.) Continuum Physics, vol. 3, pp. 1–127. Academic Press, New York
3.
go back to reference Dost, S., Erbay, H.A.: A continuum model for liquid-phase electroepitaxy. Int. J. Eng. Sci. 33, 1385–1402 (1995)CrossRef Dost, S., Erbay, H.A.: A continuum model for liquid-phase electroepitaxy. Int. J. Eng. Sci. 33, 1385–1402 (1995)CrossRef
4.
go back to reference Dost, S., Qin, Z.: A model for liquid phase electroepitaxy under an external magnetic field I. Theory. J. Cryst. Growth 153, 123–130 (1995)CrossRef Dost, S., Qin, Z.: A model for liquid phase electroepitaxy under an external magnetic field I. Theory. J. Cryst. Growth 153, 123–130 (1995)CrossRef
5.
go back to reference Series, R.W., Hurle, D.T.J.: The use of magnetic fields in semiconductor crystal-growth. J. Cryst. Growth 113, 305–328 (1991)CrossRef Series, R.W., Hurle, D.T.J.: The use of magnetic fields in semiconductor crystal-growth. J. Cryst. Growth 113, 305–328 (1991)CrossRef
6.
go back to reference Dost, S., Sheibani, H.: A mathematical model for solution growth of bulk crystals under electric and magnetic fields. Philos. Mag. 85(33–35), 4331–4351 (2005)CrossRef Dost, S., Sheibani, H.: A mathematical model for solution growth of bulk crystals under electric and magnetic fields. Philos. Mag. 85(33–35), 4331–4351 (2005)CrossRef
7.
go back to reference Dost, S., Lent, B.: Single crystal growth of semiconductors from metallic solutions. Elsevier, Amsterdam, The Netherlands (2007). ISBN: 0 444 52232CrossRef Dost, S., Lent, B.: Single crystal growth of semiconductors from metallic solutions. Elsevier, Amsterdam, The Netherlands (2007). ISBN: 0 444 52232CrossRef
8.
go back to reference Kim, D.H., Adornato, P.M., Brown, R.A.: Effect of vertical magnetic field on convection and segregation in vertical Bridgman crystal growth. J. Cryst. Growth 89, 339–356 (1988)CrossRef Kim, D.H., Adornato, P.M., Brown, R.A.: Effect of vertical magnetic field on convection and segregation in vertical Bridgman crystal growth. J. Cryst. Growth 89, 339–356 (1988)CrossRef
9.
go back to reference Hirata, H., Hoshikawa, K.: 3-dimensional numerical analyses of the effects of a cusp magnetic field on the flows, oxygen transport and heat transfer in a Czochralski silicon melt. J. Cryst. Growth 125, 181–207 (1992)CrossRef Hirata, H., Hoshikawa, K.: 3-dimensional numerical analyses of the effects of a cusp magnetic field on the flows, oxygen transport and heat transfer in a Czochralski silicon melt. J. Cryst. Growth 125, 181–207 (1992)CrossRef
10.
go back to reference Baumgartl, J., Muller, G.: Calculation of the effects of magnetic field damping on fluid flow: comparison of magnetohydrodynamic models of different complexity. In: Proceedings of the VIIIth Enropean Symposium on Materials and Fluid Sciences in Microgravity, Noordwijk, The Netherlands, pp. 161–164 (1992) Baumgartl, J., Muller, G.: Calculation of the effects of magnetic field damping on fluid flow: comparison of magnetohydrodynamic models of different complexity. In: Proceedings of the VIIIth Enropean Symposium on Materials and Fluid Sciences in Microgravity, Noordwijk, The Netherlands, pp. 161–164 (1992)
11.
go back to reference Baumgartl, J., Hubert, A., Muller, G.: The use of magnetohydrodynamic effects to investigate fluid flow in electrically conducting melts. Phys. Fluids A 5, 3280–3289 (1993)CrossRef Baumgartl, J., Hubert, A., Muller, G.: The use of magnetohydrodynamic effects to investigate fluid flow in electrically conducting melts. Phys. Fluids A 5, 3280–3289 (1993)CrossRef
12.
go back to reference Salk, M., Lexow, B., Benz, K.W., et al.: CdTe crystal growth in the soviet facility ZONA 4. Microgravity Sci. Technol. 6, 88 (1993) Salk, M., Lexow, B., Benz, K.W., et al.: CdTe crystal growth in the soviet facility ZONA 4. Microgravity Sci. Technol. 6, 88 (1993)
13.
go back to reference Hurle, D.T.J. (ed.): Handbook of Crystal Growth 2: Bulk crystal growth, Part B: Growth Mechanisms and Dynamics, North-Holland (1994) Hurle, D.T.J. (ed.): Handbook of Crystal Growth 2: Bulk crystal growth, Part B: Growth Mechanisms and Dynamics, North-Holland (1994)
14.
go back to reference Oshima, M., Taniguchi, N., Kobayashi, T.: Numerical investigation of 3-dimensional melt convection with the magnetic Czochralski method. J. Crystal Growth 137, 48–53 (1994) Oshima, M., Taniguchi, N., Kobayashi, T.: Numerical investigation of 3-dimensional melt convection with the magnetic Czochralski method. J. Crystal Growth 137, 48–53 (1994)
15.
go back to reference Salk, M., Fiederle, M., Benz, K.W., Senchenkov, A.S., Egorov, A.V., Matioukhin, D.G.: CdTe and CdTe0.9Se0.1 crystal grown by the traveling heater method using a rotating magnetic field. J. Cryst. Growth 138, 161–167 (1994)CrossRef Salk, M., Fiederle, M., Benz, K.W., Senchenkov, A.S., Egorov, A.V., Matioukhin, D.G.: CdTe and CdTe0.9Se0.1 crystal grown by the traveling heater method using a rotating magnetic field. J. Cryst. Growth 138, 161–167 (1994)CrossRef
16.
go back to reference Price, M.W., Andrews, R.N., Su, C.H., Lehoczky, S.L., Szofran, F.R.: The effect of a transverse magnetic field on the microstructure of directionally solidified CdTe. J. Cryst. Growth 137, 201–207 (1994)CrossRef Price, M.W., Andrews, R.N., Su, C.H., Lehoczky, S.L., Szofran, F.R.: The effect of a transverse magnetic field on the microstructure of directionally solidified CdTe. J. Cryst. Growth 137, 201–207 (1994)CrossRef
17.
go back to reference Qin, Z., Dost, S., Djilali, N., Tabarrok, B.: A model for liquid phase electroepitaxy under an external magnetic field II. Application. J. Cryst. Growth 153, 131–139 (1995)CrossRef Qin, Z., Dost, S., Djilali, N., Tabarrok, B.: A model for liquid phase electroepitaxy under an external magnetic field II. Application. J. Cryst. Growth 153, 131–139 (1995)CrossRef
18.
go back to reference Ben Hadid, H., Henry, D.: Numerical study of convection in the horizontal Bridgman configuration under the action of a constant magnetic field. Part 1. Two dimensional flow. J. Fluid Mech. 333, 23–56 (1996)CrossRef Ben Hadid, H., Henry, D.: Numerical study of convection in the horizontal Bridgman configuration under the action of a constant magnetic field. Part 1. Two dimensional flow. J. Fluid Mech. 333, 23–56 (1996)CrossRef
19.
go back to reference Ben Hadid, H., Henry, D.: Numerical study of convection in the horizontal Bridgman configuration under the action of a constant magnetic field. Part 2. Three-dimensional flow. J. Fluid Mech. 333, 57–83 (1996)CrossRef Ben Hadid, H., Henry, D.: Numerical study of convection in the horizontal Bridgman configuration under the action of a constant magnetic field. Part 2. Three-dimensional flow. J. Fluid Mech. 333, 57–83 (1996)CrossRef
20.
go back to reference Kakimoto, K., Yi, K.W., Eguchi, M.: Oxygen transfer during single silicon growth in Czochralski system with vertical magnetic fields. J. Cryst. Growth 163, 238–242 (1996)CrossRef Kakimoto, K., Yi, K.W., Eguchi, M.: Oxygen transfer during single silicon growth in Czochralski system with vertical magnetic fields. J. Cryst. Growth 163, 238–242 (1996)CrossRef
21.
go back to reference Fiederle, M., Eiche, C., Joerger, W., Salk, M., Senchenkov, A.S., Egorov, A.V., Ebling, D.G., Benz, K.W.: Radiation detector properties of CdTe0.9Se0.1Cl crystals grown under microgravity in a rotating magnetic field. J. Cryst. Growth 166, 256–260 (1996)CrossRef Fiederle, M., Eiche, C., Joerger, W., Salk, M., Senchenkov, A.S., Egorov, A.V., Ebling, D.G., Benz, K.W.: Radiation detector properties of CdTe0.9Se0.1Cl crystals grown under microgravity in a rotating magnetic field. J. Cryst. Growth 166, 256–260 (1996)CrossRef
22.
go back to reference Dost, S.: Recent developments in modeling of liquid phase electroepitaxy: a continuum approach. Appl. Mech. Rev. 49(12), 477–495 (1996)CrossRef Dost, S.: Recent developments in modeling of liquid phase electroepitaxy: a continuum approach. Appl. Mech. Rev. 49(12), 477–495 (1996)CrossRef
23.
go back to reference Qin, Z., Dost, S.: A model for liquid phase electroepitaxial growth of ternary alloy semiconductors. Int. J. Electromagnet. Mech. 7(2), 129–142 (1996) Qin, Z., Dost, S.: A model for liquid phase electroepitaxial growth of ternary alloy semiconductors. Int. J. Electromagnet. Mech. 7(2), 129–142 (1996)
24.
go back to reference Dost, S., Qin, Z.: A numerical simulation model for liquid phase electroepitaxial growth of GaInAs. J. Cryst. Growth 187, 51–64 (1998)CrossRef Dost, S., Qin, Z.: A numerical simulation model for liquid phase electroepitaxial growth of GaInAs. J. Cryst. Growth 187, 51–64 (1998)CrossRef
25.
go back to reference Senchenkov, A.S., Barmin, I.V., Tomson, A.S., Krapukhin, V.V.: Seedless THM growth of Cd(x)Hg(1-x)Te (approximately x = 0.2) single crystals within rotating magnetic field. J. Cryst. Growth 197, 552–556 (1999)CrossRef Senchenkov, A.S., Barmin, I.V., Tomson, A.S., Krapukhin, V.V.: Seedless THM growth of Cd(x)Hg(1-x)Te (approximately x = 0.2) single crystals within rotating magnetic field. J. Cryst. Growth 197, 552–556 (1999)CrossRef
26.
go back to reference Ghaddar, C.K., Lee, C.K., Motakef, S., Gillies, D.C.: Numerical simulation of THM growth of CdTe in presence of rotating magnetic fields (RMF). J. Cryst. Growth 205, 97–111 (1999)CrossRef Ghaddar, C.K., Lee, C.K., Motakef, S., Gillies, D.C.: Numerical simulation of THM growth of CdTe in presence of rotating magnetic fields (RMF). J. Cryst. Growth 205, 97–111 (1999)CrossRef
27.
go back to reference Davoust, L., Cowley, M.D., Moreau, R., Bolcato, R.: Buoyancy-driven convection with an uniform magnetic field. Part 2. Experimental investigation. J. Fluid Mech. 400, 59–90 (1999)CrossRef Davoust, L., Cowley, M.D., Moreau, R., Bolcato, R.: Buoyancy-driven convection with an uniform magnetic field. Part 2. Experimental investigation. J. Fluid Mech. 400, 59–90 (1999)CrossRef
28.
go back to reference Meric, R.A., Dost, S., Lent, B., Redden, R.F.: A finite element model for the growth of ternary alloy GaInSb by the travelling heater method. Int. J. Electromagnet. Mech. 10, 505–526 (1999)CrossRef Meric, R.A., Dost, S., Lent, B., Redden, R.F.: A finite element model for the growth of ternary alloy GaInSb by the travelling heater method. Int. J. Electromagnet. Mech. 10, 505–526 (1999)CrossRef
29.
go back to reference Dost, S.: Numerical simulation of liquid phase electroepitaxial growth of GaInAs under magnetic field. ARI-the Bull. ITU 51, 235–246 (1999) Dost, S.: Numerical simulation of liquid phase electroepitaxial growth of GaInAs under magnetic field. ARI-the Bull. ITU 51, 235–246 (1999)
30.
go back to reference Jing, C.J., Imaishi, N., Yasuhiro, S., Sato, T., Miyazawa, Y.: Three-dimensional numerical simulation of rotating spoke pattern in an oxide melt under a magnetic field. Inter. J. Heat Mass Transf. 43, 4347–4359 (2000)CrossRef Jing, C.J., Imaishi, N., Yasuhiro, S., Sato, T., Miyazawa, Y.: Three-dimensional numerical simulation of rotating spoke pattern in an oxide melt under a magnetic field. Inter. J. Heat Mass Transf. 43, 4347–4359 (2000)CrossRef
31.
go back to reference Dost, S., Sheibani, H.: In Mechanics of Electromagnetic Materials and Structures in Studies in Appl. Electr. Mech., (Eds. J.S. Yang, G.A. Maugin), 19, pp. 17–29. IOS Press, Amsterdam (2000) Dost, S., Sheibani, H.: In Mechanics of Electromagnetic Materials and Structures in Studies in Appl. Electr. Mech., (Eds. J.S. Yang, G.A. Maugin), 19, pp. 17–29. IOS Press, Amsterdam (2000)
32.
go back to reference Vizman, D., Friedrich, J., Muller, G.: Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields. J. Cryst. Growth 230, 73–80 (2001)CrossRef Vizman, D., Friedrich, J., Muller, G.: Comparison of the predictions from 3D numerical simulation with temperature distributions measured in Si Czochralski melts under the influence of different magnetic fields. J. Cryst. Growth 230, 73–80 (2001)CrossRef
33.
go back to reference Ben Hadid, H., Vaux, Samuel, Kaddeche, Slim: Three dimensional flow transitions under a rotating magnetic field. J. Cryst. Growth 230, 57–62 (2001)CrossRef Ben Hadid, H., Vaux, Samuel, Kaddeche, Slim: Three dimensional flow transitions under a rotating magnetic field. J. Cryst. Growth 230, 57–62 (2001)CrossRef
34.
go back to reference Akamatsu, M., Higano, M., Ozoe, H.: Elliptic temperature contours under a transverse magnetic field computed for a Czochralski melt. Int. J. Heat Mass Transf. 44, 3253–3264 (2001)CrossRef Akamatsu, M., Higano, M., Ozoe, H.: Elliptic temperature contours under a transverse magnetic field computed for a Czochralski melt. Int. J. Heat Mass Transf. 44, 3253–3264 (2001)CrossRef
35.
go back to reference Dost, S., Liu, Y.C., Lent, B.: A numerical simulation study for the effect of applied magnetic field in liquid phase electroepitaxy. J. Cryst. Growth 240, 39–51 (2002)CrossRef Dost, S., Liu, Y.C., Lent, B.: A numerical simulation study for the effect of applied magnetic field in liquid phase electroepitaxy. J. Cryst. Growth 240, 39–51 (2002)CrossRef
36.
go back to reference Liu, Y.C., Okano, Y., Dost, S.: The effect of applied magnetic field on flow structures in liquid phase electroepitaxy—a three-dimensional simulation model. J. Cryst. Growth 244, 12–26 (2002)CrossRef Liu, Y.C., Okano, Y., Dost, S.: The effect of applied magnetic field on flow structures in liquid phase electroepitaxy—a three-dimensional simulation model. J. Cryst. Growth 244, 12–26 (2002)CrossRef
37.
go back to reference Okano, Y., Nishino, S.-S., Ohkubo, S.-S., Dost, S.: Numerical study of transport phenomena in the THM growth of compound semiconductor crystal. J. Cryst. Growth 238–239, 1779–1784 (2002)CrossRef Okano, Y., Nishino, S.-S., Ohkubo, S.-S., Dost, S.: Numerical study of transport phenomena in the THM growth of compound semiconductor crystal. J. Cryst. Growth 238–239, 1779–1784 (2002)CrossRef
38.
go back to reference Liu, Y.C., Sheibani, H., Sakai, S., Okano, Y., Dost, S.: In: Kleijn, C.R., Kawano, S. (eds.) Computational Technologies for Fluid/Thermal/Structural/Chemical Systems with Industrial Applications. ASME Proceedings, New York, PVP-vol. 448-1, pp. 65–72 (2002). ISBN: 0-7918-4659-8 Liu, Y.C., Sheibani, H., Sakai, S., Okano, Y., Dost, S.: In: Kleijn, C.R., Kawano, S. (eds.) Computational Technologies for Fluid/Thermal/Structural/Chemical Systems with Industrial Applications. ASME Proceedings, New York, PVP-vol. 448-1, pp. 65–72 (2002). ISBN: 0-7918-4659-8
39.
go back to reference Sheibani, H., Dost, S., Sakai, S., Lent, B.: Growth of bulk single crystals under applied magnetic field by liquid phase electroepitaxy. J. Cryst. Growth 258(3–4), 283–295 (2003)CrossRef Sheibani, H., Dost, S., Sakai, S., Lent, B.: Growth of bulk single crystals under applied magnetic field by liquid phase electroepitaxy. J. Cryst. Growth 258(3–4), 283–295 (2003)CrossRef
40.
go back to reference Sheibani, H., Liu, Y.C., Sakai, S., Lent, B., Dost, S.: The effect of applied magnetic field on the growth mechanisms of liquid phase electroepitaxy. Int. J. Eng. Sci. 41, 401–415 (2003)CrossRef Sheibani, H., Liu, Y.C., Sakai, S., Lent, B., Dost, S.: The effect of applied magnetic field on the growth mechanisms of liquid phase electroepitaxy. Int. J. Eng. Sci. 41, 401–415 (2003)CrossRef
41.
go back to reference Okano, Y., Kondo, H., Dost, S.: Control of transport structures in a rotating liquid cylinder by means of an applied magnetic field. Int. J. Electromagnet. Mech. 18(4), 217–226 (2003)CrossRef Okano, Y., Kondo, H., Dost, S.: Control of transport structures in a rotating liquid cylinder by means of an applied magnetic field. Int. J. Electromagnet. Mech. 18(4), 217–226 (2003)CrossRef
42.
go back to reference Dost, S., Liu, Y.C., Lent, B.: A numerical simulation study for the effect of applied magnetic field in growth of CdTe single crystals by the traveling heater method. Int. J. Electromagnet. Mech. 17, 271–288 (2003)CrossRef Dost, S., Liu, Y.C., Lent, B.: A numerical simulation study for the effect of applied magnetic field in growth of CdTe single crystals by the traveling heater method. Int. J. Electromagnet. Mech. 17, 271–288 (2003)CrossRef
43.
go back to reference Liu, Y.C., Dost, S., Lent, B., Redden, R.F.: A three-dimensional numerical simulation model for the growth of CdTe single crystals by the traveling heater method under magnetic field. J. Cryst. Growth 254, 285–297 (2003)CrossRef Liu, Y.C., Dost, S., Lent, B., Redden, R.F.: A three-dimensional numerical simulation model for the growth of CdTe single crystals by the traveling heater method under magnetic field. J. Cryst. Growth 254, 285–297 (2003)CrossRef
44.
go back to reference Roszmann, J., Dost, S., Lent, F.: Crystal growth by the travelling heater method using tapered crucibles and applied rotating magnetic field. Cryst. Res. Technol. 45(8), 785–790 (2010)CrossRef Roszmann, J., Dost, S., Lent, F.: Crystal growth by the travelling heater method using tapered crucibles and applied rotating magnetic field. Cryst. Res. Technol. 45(8), 785–790 (2010)CrossRef
45.
go back to reference Liu, Y.C., Dost, S., Sheibani, H.: A three dimensional numerical simulation for the transport structures in liquid phase electroepitaxy under applied magnetic field. Int. J. Transp. Phenom. 6, 51–62 (2004) Liu, Y.C., Dost, S., Sheibani, H.: A three dimensional numerical simulation for the transport structures in liquid phase electroepitaxy under applied magnetic field. Int. J. Transp. Phenom. 6, 51–62 (2004)
46.
go back to reference Dost, S., Lent, B., Sheibani, H., Liu, Y.C.: Recent developments in liquid phase electroepitaxial growth of bulk crystals under magnetic field. Comptes rendus de mecanique 332(5–6), 413–428 (2004)CrossRef Dost, S., Lent, B., Sheibani, H., Liu, Y.C.: Recent developments in liquid phase electroepitaxial growth of bulk crystals under magnetic field. Comptes rendus de mecanique 332(5–6), 413–428 (2004)CrossRef
47.
go back to reference Jastrzebski, L., Gatos, H.C., Witt, A.F.: Electromigration in current-controlled LPEE. J. Electrochem. Soc. 123, 1121 (1976)CrossRef Jastrzebski, L., Gatos, H.C., Witt, A.F.: Electromigration in current-controlled LPEE. J. Electrochem. Soc. 123, 1121 (1976)CrossRef
48.
go back to reference Jastrzebski, L., Imamura, Y., Gatos, H.C.: Thickness uniformity of GaAs layers grown by electroepitaxy. J. Electrochem. Soc. 125, 1140–1146 (1978)CrossRef Jastrzebski, L., Imamura, Y., Gatos, H.C.: Thickness uniformity of GaAs layers grown by electroepitaxy. J. Electrochem. Soc. 125, 1140–1146 (1978)CrossRef
49.
go back to reference Okamoto, A., Lakowski, L., Gatos, H.C.: Enhancement of interface stability in liquid-phase electroepitaxy. J. Appl. Phys. 53, 1706–1713 (1982)CrossRef Okamoto, A., Lakowski, L., Gatos, H.C.: Enhancement of interface stability in liquid-phase electroepitaxy. J. Appl. Phys. 53, 1706–1713 (1982)CrossRef
50.
go back to reference Nakajima, K.: Liquid-phase epitaxial-growth of very thick In1-xGaxAs layers with uniform composition by source-current-controlled method. J. Appl. Phys. 61(9), 4626–4634 (1987)CrossRef Nakajima, K.: Liquid-phase epitaxial-growth of very thick In1-xGaxAs layers with uniform composition by source-current-controlled method. J. Appl. Phys. 61(9), 4626–4634 (1987)CrossRef
51.
go back to reference Bryskiewicz, T., Boucher Jr., C.F., Lagowski, J., Gatos, H.C.: Bulk GaAS crystal growth by liquid phase electroepitaxy. J. Cryst. Growth 82, 279–288 (1987)CrossRef Bryskiewicz, T., Boucher Jr., C.F., Lagowski, J., Gatos, H.C.: Bulk GaAS crystal growth by liquid phase electroepitaxy. J. Cryst. Growth 82, 279–288 (1987)CrossRef
52.
go back to reference Nakajima, K.: Layer thickness calculation of In1-vGavAs grown by the source-current-controlled method—diffusion and electromigration limited growth. J. Cryst. Growth 98, 329–340 (1989)CrossRef Nakajima, K.: Layer thickness calculation of In1-vGavAs grown by the source-current-controlled method—diffusion and electromigration limited growth. J. Cryst. Growth 98, 329–340 (1989)CrossRef
53.
go back to reference Bryskiewicz, T., Edelman, P., Wasilewski, Z., Coulas, D., Noad, J.: Properties of very uniform InxGa1-xAs single-crystals grown by liquid-phase electroepitaxy. J. Appl. Phys. 68, 3018–3020 (1990)CrossRef Bryskiewicz, T., Edelman, P., Wasilewski, Z., Coulas, D., Noad, J.: Properties of very uniform InxGa1-xAs single-crystals grown by liquid-phase electroepitaxy. J. Appl. Phys. 68, 3018–3020 (1990)CrossRef
54.
go back to reference Nakajima, K., Kusunoki, T., Takenaka, C.: Growth of ternary InxGa1-xAs bulk crystals with a uniform composition through supply of GaAs. J. Cryst. Growth 113, 485–490 (1991)CrossRef Nakajima, K., Kusunoki, T., Takenaka, C.: Growth of ternary InxGa1-xAs bulk crystals with a uniform composition through supply of GaAs. J. Cryst. Growth 113, 485–490 (1991)CrossRef
55.
go back to reference Bryskiewicz, T., Laferriere, A.: Growth of alloy substrates by liquid phase electroepitaxy—Theoretical considerations. J. Cryst. Growth 129, 429–442 (1993)CrossRef Bryskiewicz, T., Laferriere, A.: Growth of alloy substrates by liquid phase electroepitaxy—Theoretical considerations. J. Cryst. Growth 129, 429–442 (1993)CrossRef
56.
go back to reference Zytkiewicz, Z.R.: Influence of convection on the composition profiles of thick GaAlAs layers grown by liquid-phase electroepitaxy. J. Cryst. Growth 131, 426–430 (1993)CrossRef Zytkiewicz, Z.R.: Influence of convection on the composition profiles of thick GaAlAs layers grown by liquid-phase electroepitaxy. J. Cryst. Growth 131, 426–430 (1993)CrossRef
57.
go back to reference Zytkiewicz, Z.R.: Joule effect as a barrier for unrestricted growth of bulk crystals by liquid phase electroepitaxy. J. Cryst. Growth 172, 259–268 (1996)CrossRef Zytkiewicz, Z.R.: Joule effect as a barrier for unrestricted growth of bulk crystals by liquid phase electroepitaxy. J. Cryst. Growth 172, 259–268 (1996)CrossRef
58.
go back to reference Minakuchi, H., Okano, Y., Dost, S.: A three-dimensional numerical simulation study of the Marangoni convection occurring in the crystal growth of SixGe1-x by the Float-zone technique in zero gravity. J. Cryst. Growth 266, 140–144 (2004)CrossRef Minakuchi, H., Okano, Y., Dost, S.: A three-dimensional numerical simulation study of the Marangoni convection occurring in the crystal growth of SixGe1-x by the Float-zone technique in zero gravity. J. Cryst. Growth 266, 140–144 (2004)CrossRef
59.
go back to reference Minakuchi, H., Okano, Y., Dost, S.: A three dimensional numerical study of marangoni convection in a floating full zone. In: Dost, S. (ed.) Crystal Growth of Semiconductor from the Liquid Phase. IJMPT 22(1/2/3), 151–171 (2005) Minakuchi, H., Okano, Y., Dost, S.: A three dimensional numerical study of marangoni convection in a floating full zone. In: Dost, S. (ed.) Crystal Growth of Semiconductor from the Liquid Phase. IJMPT 22(1/2/3), 151–171 (2005)
60.
go back to reference Timchenko, V., Chen, P.Y.P., de Vahl Davis, G., Leonardi, E., Abbaschian, R.: A computational study of transient plane front solidification of alloys in a Bridgman apparatus under microgravity conditions. Int. J. Heat Mass Transf. 43, 963–980 (2000)CrossRef Timchenko, V., Chen, P.Y.P., de Vahl Davis, G., Leonardi, E., Abbaschian, R.: A computational study of transient plane front solidification of alloys in a Bridgman apparatus under microgravity conditions. Int. J. Heat Mass Transf. 43, 963–980 (2000)CrossRef
61.
go back to reference Timchenko, V., Chen, P.Y.P., de Vahl Davis, G., Leonardi, E., Abbaschian, R.: A computational study of binary alloy solidification in the Mephisto experiment. Int. J. Heat Mass Transf. 23, 258–268 (2002)MATH Timchenko, V., Chen, P.Y.P., de Vahl Davis, G., Leonardi, E., Abbaschian, R.: A computational study of binary alloy solidification in the Mephisto experiment. Int. J. Heat Mass Transf. 23, 258–268 (2002)MATH
Metadata
Title
Modeling Semiconductor Crystal Growth Under Electromagnetic Fields
Author
Sadik Dost
Copyright Year
2018
Publisher
Springer International Publishing
DOI
https://doi.org/10.1007/978-3-319-77504-3_4

Premium Partners