Monte Carlo Simulation of an Ion Sputtering Process of Polymer Materials

Recently, the surface analysis of polymer materials has been becoming more and more important in industry. SIMS is expected to become a powerful tool for characterization of polymer surfaces. Several authors [1–5] have discussed the potential of SIMS in the field. However, understanding of sputtering mechanism of polymers is far from a satisfactory level. In this paper, we have examined sputtered surfaces with XPX and interpreted the observed spectra with a simple calculation based on Monte Carlo simulation.