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Journal of Materials Science: Materials in Electronics

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01-01-2024

N-type and P-type SnO_x thin films based MOX gas sensor testing

Authors: Sidi Mohammed Merah, Yamna Bakha, Abdelkader Djelloul

Published in: Journal of Materials Science: Materials in Electronics | Issue 3/2024

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Abstract

In this article, n-type and p-type SnO_x thin films are deposited using the same precursor with a simple chemical method of spray pyrolysis on the top of the fabricated MOX gas sensor at T = 350 ℃ and 500 ℃ respectively, without any post-deposition annealing step. The deposited films were investigated using the following characterization methods. X-ray diffraction revealed that the deposited n-type SnO₂ thin films have a tetragonal rutile structure and in p-type SnO we identified two phases, a tetragonal SnO and orthorhombic SnO. Atomic force microscopy (AFM) indicates that films are homogenous and uniform within a scanned area of 334 nm with a small grain size of 10–15 nm. The performance of the fabricated sensors was performed by electrical characterization and sensing behavior under different concentrations of ethanol C = 7000 ppm, 3500 ppm, 1200 ppm, 600 ppm, and 300 ppm, at an operating temperature T_op = 250 ℃ and RH 50%. The evolution under gases showed a higher response for p-type SnO as compared to n-type SnO₂.

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J. Burgués, S. Marco, Low power operation of temperature-modulated metal oxide semiconductor gas sensors. Sensors 18(2), 339 (2018)ADSPubMedPubMedCentral

S. Chaisitsak, Nanocrystalline SnO₂: F thin films for liquid petroleum gas sensors. Sensors 11(7), 7127–7140 (2011)ADSPubMedPubMedCentral

Y. Bakha, S.M. Merah, H. Khales, M. Kameche, A. Djelloul, Development of new co-planar platform configuration of MOX gas sensor. Appl. Phys. A 129(5), 363 (2023)ADS

C. Travan, A. Bergmann, NO₂ and NH₃ sensing characteristics of inkjet printing graphene gas sensors. Sensors 19(15), 3379 (2019)ADSPubMedPubMedCentral

J. Spannhake, A. Helwig, O. Schulz, and G. Müller, Micro-fabrication of gas sensors. in Solid State Gas Sensing, Springer, 2008, pp. 1–46.

P.K. Sekhar et al., Application of commercial automotive sensor manufacturing methods for NO_x/NH₃ mixed potential sensors for on-board emissions control. Sens. Actuators B Chem. 144(1), 112–119 (2010)

H. Liu, L. Zhang, K.H.H. Li, O.K. Tan, Microhotplates for metal oxide semiconductor gas sensor applications—Towards the CMOS-MEMS monolithic approach. Micromachines 9(11), 557 (2018)PubMedPubMedCentral

G.F. Fine, L.M. Cavanagh, A. Afonja, R. Binions, Metal oxide semi-conductor gas sensors in environmental monitoring. Sensors 10(6), 5469–5502 (2010)ADSPubMedPubMedCentral

M. Grassi, P. Malcovati, L. Francioso, P. Siciliano, A. Baschirotto, Integrated interface circuit with multiplexed input and digital output for a 5 × 5 SnO₂ thick film gas-sensor matrix. Sens. Actuators B Chem. 132(2), 568–575 (2008)

10.

P. Bhattacharyya, Technological journey towards reliable microheater development for MEMS gas sensors: a review. IEEE Trans. device Mater. Reliab. 14(2), 589–599 (2014)

11.

M. Gardon, J.M. Guilemany, A review on fabrication, sensing mechanisms and performance of metal oxide gas sensors. J. Mater. Sci. Mater. Electron. 24, 1410–1421 (2013)

12.

N. Goel, K. Kunal, A. Kushwaha, M. Kumar, Metal oxide semiconductors for gas sensing. Eng. Reports 5(6), e12604 (2023)

13.

K.G. Krishna, S. Parne, N. Pothukanuri, V. Kathirvelu, S. Gandi, D. Joshi, Nanostructured metal oxide semiconductor-based gas sensors: a comprehensive review. Sens. Actuators A Phys. 341, 113578 (2022)

14.

R.C. Pawar et al., Surfactant assisted low temperature synthesis of nanocrystalline ZnO and its gas sensing properties. Sens. Actuators B Chem. 151(1), 212–218 (2010)

15.

Y. Xing, T.A. Vincent, M. Cole, J.W. Gardner, Real-time thermal modulation of high bandwidth MOX gas sensors for mobile robot applications. Sensors 19(5), 1180 (2019)ADSPubMedPubMedCentral

16.

C. Guillén, J. Herrero, P-type SnO thin films prepared by reactive sputtering at high deposition rates. J. Mater. Sci. Technol. 35(8), 1706–1711 (2019)

17.

J. Um, S.E. Kim, Homo-junction pn diode using p-type SnO and n-type SnO₂ thin films. ECS Solid State Lett. 3(8), P94 (2014)

18.

S. Benzitouni et al., High sensitivity of porous Cu-doped SnO₂ thin films to methanol. Adv. Nanoparticles 5(02), 140–148 (2016)

19.

M. Batzill, U. Diebold, The surface and materials science of tin oxide. Prog. Surf. Sci. 79(2–4), 47–154 (2005)ADS

20.

M.A. Mäki-Jaskari, T.T. Rantala, Possible structures of nonstoichiometric tin oxide: the composition Sn₂O₃. Model. Simul. Mater. Sci. Eng. 12(1), 33 (2003)ADS

21.

J. Sundqvist, J. Lu, M. Ottosson, A. Hårsta, Growth of SnO₂ thin films by atomic layer deposition and chemical vapour deposition: a comparative study. Thin Solid Films 514(1–2), 63–68 (2006)ADS

22.

A. Shanmugasundaram, P. Basak, L. Satyanarayana, S.V. Manorama, Hierarchical SnO/SnO₂ nanocomposites: Formation of in situ p–n junctions and enhanced H₂ sensing. Sens. Actuators B Chem. 185, 265–273 (2013)

23.

Y. Bakha, H. Khales, A. Tab, A. Smatti, and S. Hamzaoui, Structural and Optical Parameters of SnO₂ Nanoparticle Deposited by Spray Pyrolysis. in ICREEC 2019: Proceedings of the 1st International Conference on Renewable Energy and Energy Conversion, 2020, p. 335.

24.

Y. Bakha, Y. Djeridane, W. Aouimeur, L. Menasri, A. Smatti, and S. Hamzaoui, ZnO based gas sensor testing. in 2014 9th International Design and Test Symposium (IDT), pp. 1–3 (2014)

25.

C.M. Campo, J.E. Rodríguez, A.E. Ramírez, Thermal behaviour of romarchite phase SnO in different atmospheres: a hypothesis about the phase transformation. Heliyon (2016). https://doi.org/10.1016/j.heliyon.2016.e00112CrossRefPubMedPubMedCentral

26.

J. Oviedo, M.J. Gillan, First-principles study of the interaction of oxygen with the SnO₂ (1 1 0) surface. Surf. Sci. 490(3), 221–236 (2001)ADS

27.

M.A. Bouacheria, A. Djelloul, M. Adnane, Y. Larbah, L. Benharrat, Characterization of pure and Al doped ZnO thin films prepared by sol gel method for solar cell applications. J. Inorg. Organomet. Polym. Mater. 32(7), 2737–2747 (2022)

28.

A.L. Patterson, The Scherrer formula for X-ray particle size determination. Phys. Rev. 56(10), 978 (1939)ADS

29.

P. Kumar, G.K. Rao, Comprehensive analysis of microstructural, optical and electrical properties of ZnS thin films deposited by cost effective SILAR technique. Mater. Today Proc. 65, 380–384 (2022)

30.

G.K. Williamson, R.E. Smallman, III. Dislocation densities in some annealed and cold-worked metals from measurements on the X-ray debye-scherrer spectrum. Philos. Mag. 1(1), 34–46 (1956)ADS

31.

İA. Kariper, Optical properties and surface energy of tellurium oxide thin film. J. Opt. 47, 504–510 (2018)

32.

M.F. Pervez et al., Influence of total absorbed dose of gamma radiation on optical bandgap and structural properties of Mg-doped zinc oxide. Optik (Stuttg) 162, 140–150 (2018)ADS

33.

A. Dieguez, A. Romano-Rodrıguez, A. Vila, J.R. Morante, The complete Raman spectrum of nanometric SnO₂ particles. J. Appl. Phys. 90(3), 1550–1557 (2001)ADS

34.

A. Nikiforov et al., Formation of SnO and SnO₂ phases during the annealing of SnO(x) films obtained by molecular beam epitaxy. Appl. Surf. Sci. 512, 145735 (2020)

35.

J.S. Jung, S.J. Park, J.H. Ye, J.G. Woo, B.S. Bae, E.-J. Yun, Optical, structural, and electrical properties of sputter-deposited SnO_x thin films. Thin Solid Films 747, 139139 (2022)ADS

36.

J. Joseph, V. Mathew, J. Mathew, K.E. Abraham, Studies on physical properties and carrier conversion of SnO₂: Nd thin films. Turkish J. Phys. 33(1), 37–47 (2009)

37.

G. Suresh, R. Sathishkumar, B. Iruson, B. Sathyaseelan, K. Senthilnathan, E. Manikandan, Study on structural, luminescence properties and Hall effect of SnO₂ nanoparticles obtained by a Co-precipitation technique. Int. J. Nano Dimens. 10(3), 242–251 (2019)

38.

C. Wang, L. Yin, L. Zhang, D. Xiang, R. Gao, Metal oxide gas sensors: sensitivity and influencing factors. Sensors 10(3), 2088–2106 (2010)ADSPubMedPubMedCentral

39.

H. Fan, T. Zhang, X. Xu, N. Lv, Fabrication of N-type Fe₂O₃ and P-type LaFeO₃ nanobelts by electrospinning and determination of gas-sensing properties. Sens. Actuators B Chem. 153(1), 83–88 (2011)

40.

Y.K. Gautam, K. Sharma, S. Tyagi, A.K. Ambedkar, M. Chaudhary, B. Pal Singh, Nanostructured metal oxide semiconductor-based sensors for greenhouse gas detection: progress and challenges. R. Soc. Open Sci. 8(3), 201324 (2021)ADSPubMedPubMedCentral

41.

C. Fan et al., Enhanced H₂S gas sensing properties by the optimization of p-CuO/n-ZnO composite nanofibers. J. Mater. Sci. 55(18), 7702–7714 (2020)ADS

42.

A. Alhadi et al., Pure SnO₂ gas sensor with high sensitivity and selectivity towards C₂H₅OH. Adv. Nanoparticles 10(02), 66–74 (2021)

43.

R.C. Pawar, J.-W. Lee, V.B. Patil, C.S. Lee, Synthesis of multi-dimensional ZnO nanostructures in aqueous medium for the application of gas sensor. Sens. Actuators B Chem. 187, 323–330 (2013)

44.

S. Mishra, C. Ghanshyam, N. Ram, S. Singh, R.P. Bajpai, R.K. Bedi, Alcohol sensing of tin oxide thin film prepared by sol–gel process. Bull. Mater. Sci. 25, 231–234 (2002)

45.

Z. Witkiewicz, K. Jasek, M. Grabka, Semiconductor gas sensors for detecting chemical warfare agents and their simulants. Sensors 23(6), 3272 (2023)ADSPubMedPubMedCentral

Title: N-type and P-type SnOx thin films based MOX gas sensor testing
Authors: Sidi Mohammed Merah
Yamna Bakha
Abdelkader Djelloul
Publication date: 01-01-2024
Publisher: Springer US
Published in: Journal of Materials Science: Materials in Electronics / Issue 3/2024
Print ISSN: 0957-4522
Electronic ISSN: 1573-482X
DOI: https://doi.org/10.1007/s10854-024-11997-8

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